Vacancy-Type Defects in Ion-Implanted Si Studied By Slow Positron Beam
Keyword(s):
ABSTRACTVariable-energy positron beam studies have been made on ion implanted silicon. After 35, 60 and 100 keV H+ implantation a clear separation between vacancy and H atom distributions was found. In 100 keV As+ and P+ implanted Si the damaged layer extends to 300 and 400 nm, respectively, far beyond the the range of implanted atoms and the amorphous layer. Effect of thermal and laser annealing is also discussed.
2016 ◽
Vol 296
◽
pp. 65-68
◽
1991 ◽
Vol 30
(Part 1, No. 2)
◽
pp. 201-206
◽
2014 ◽
Vol 505
◽
pp. 012020
◽
Keyword(s):
2012 ◽
Vol 733
◽
pp. 236-239
◽
2014 ◽
Vol 101
◽
pp. 20-23
◽
Keyword(s):