Defect Production in Phosphorus Ion-Implanted SiO2(43 nm)/Si Studied by a Variable-Energy Positron Beam
1991 ◽
Vol 30
(Part 1, No. 2)
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pp. 201-206
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2016 ◽
Vol 296
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pp. 65-68
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1994 ◽
Vol 91
(1-4)
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pp. 410-412
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2000 ◽
Vol 164-165
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pp. 471-475
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Keyword(s):
Keyword(s):
2002 ◽
Vol 192
(1-2)
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pp. 202-205
2004 ◽
Vol 19
(23)
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pp. 3951-3959
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1997 ◽
Vol 121
(1-4)
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pp. 267-270
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