Positron spectroscopy of bulk and near-surface defects in semiconductors
Keyword(s):
The use of positron annihilation to study defects in semiconductors is discussed. Positron-lifetime spectroscopy reveals As vacancies in as-grown GaAs and gives information on ionization levels. The vacancy profiles in ion-implanted Si are investigated by slow positron beam.
1992 ◽
Vol 105-110
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pp. 1459-1462
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Keyword(s):
1995 ◽
Vol 196-201
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pp. 1165-1170
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Keyword(s):
2005 ◽
Vol 475-479
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pp. 2123-2126
1998 ◽
Vol 88-91
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pp. 677-681
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Keyword(s):
1990 ◽
Vol 173
(3)
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pp. 307-312
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