Study of Initial Stages of Heteroepitaxy Using Graded Thickness Samples
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ABSTRACTIn this paper we introduce the technique of graded thickness sample deposition to study the heteroepitaxial growth mechanisms of GaAs on Si. We can observe the continuous evolution from the initial clean surface, through nucleation, growth and coalescence of the deposited material.
2006 ◽
Vol 295
(2)
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pp. 103-107
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2007 ◽
pp. 929-932
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1998 ◽
Vol 141
(1-4)
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pp. 562-565
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1997 ◽
Vol 174
(1-4)
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pp. 635-640
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2007 ◽
Vol 544-545
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pp. 929-932