Growth of Gaas on Si Using Algap Intermediate Layer

1989 ◽  
Vol 148 ◽  
Author(s):  
N. Noto ◽  
S. Nozaki ◽  
T. Egawa ◽  
T. Soga ◽  
T. Jimbo ◽  
...  
Keyword(s):  
Intermediate Layer ◽  
Chemical Vapor ◽  
Gaas Layer ◽  
Organic Chemical ◽  
Heteroepitaxial Growth ◽  
Etch Pit ◽  
Gaas On Si ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition

ABSTRACTWe have studied heteroepitaxial growth of GaAs on Si using an AlxGa1−xP intermediate layer in an atmospheric-pressure metal organic chemical vapor deposition (NOCVD) reactor. The crystallinity of the GaAs layer depends on AlP composition(x) of the intermediate layer. The bett crystal quality of GaAs layer is obtained when the AlP composition(x) of the intermediate layer is close to 0.5. The X-ray FWHX of 180 arcs and the etch pit density (EPD) of 2.5 × 107cm−2 were obtained in this GaAs/AlGaP/Si structure.

Effect of Growth Temperature on Cobalt-Doped TiO2 Thin Films Deposited on Si (100) Substrate by MOCVD Technique

2014 ◽  
Vol 896 ◽  
pp. 192-196 ◽  
Author(s):  
Aip Saripudin ◽  
H. Saragih ◽  
Khairurrijal ◽  
Khairurrijal ◽  
Pepen Arifin
Keyword(s):  
Thin Films ◽  
Growth Temperature ◽  
Anatase Phase ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Vapor Deposition Technique ◽  
Metal Organic ◽  
Titanium Dioxide Thin Films ◽  
Organic Chemical Vapor Deposition

Co:TiO2 (cobalt-doped titanium dioxide) thin films have been deposited on the n-type Si (100) substrate at the temperatures range of 325°C 450°C using MOCVD (metal organic chemical vapor deposition) technique. We investigated the effect of growth temperature on the structural and morphological quality of Co:TiO2 thin films. The structure of Co:TiO2 thin films were characterized by XRD while the morphology and the thickness of films were characterized by SEM. The XRD results reveal that all films show the anatase structure and the dominant orientation of anatase phase depends on the growth temperature. The grain size of crystal increases as the growth temperature increases. We also reveal that the growth rate of Co:TiO2 film has a maximum value at the growth temperature of 400°C.

Metal Organic Chemical Vapor Deposition of Co-, Mn-, Co-Zr and Mn-Zr Oxide Thin Films

1999 ◽  
Vol 606 ◽  
Author(s):  
D. Barreca ◽  
F. Benetollo ◽  
M. Bozza ◽  
S. Bozza ◽  
G. Carta ◽  
...  
Keyword(s):  
Thin Films ◽  
Water Vapor ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition ◽  
Decomposition Efficiency ◽  
Mn Oxides

AbstractDeposition of thin films of Co- and Mn- oxides as well as of their mixtures with ZrO2 have been carried out by MOCVD using Co(C5H5)2, Mn(C5F6HO2)2(THF)2and (C5Hs)2Zr(CH3)2as precursors. XRD and XPS analyses of the obtained deposits are reported. Introduction of water vapor into the reactor chamber during the flow of the precursors improved their decomposition efficiency and the quality of the films.

scholarly journals Heteroepitaxial Growth of Vertical GaAs Nanowires on Si (111) Substrates by Metal−Organic Chemical Vapor Deposition

Nano Letters ◽  
2008 ◽  
Vol 8 (11) ◽  
pp. 3755-3760 ◽  
Author(s):  
Xin-Yu Bao ◽  
Cesare Soci ◽  
Darija Susac ◽  
Jon Bratvold ◽  
David P. R. Aplin ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Heteroepitaxial Growth ◽  
Gaas Nanowires ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition

Effet des paramètres de croissance sur les couches épitaxiales d'InP obtenues par MOCVD (metal-organic chemical vapor deposition) à basse pression

1991 ◽  
Vol 69 (3-4) ◽  
pp. 412-421 ◽  
Author(s):  
P. Cova ◽  
R. A. Masut ◽  
J. F. Currie ◽  
A. Bensaada ◽  
R. Leonelli ◽  
...  
Keyword(s):  
Reaction Kinetics ◽  
Vapor Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Epitaxial Layers ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition

The development of a low pressure, horizontal MOCVD (metal-organic chemical vapour deposition) reactor has allowed us to study the effect of phosphine and trimethylindium molar fluxes on the epitaxial growth of InP. Study of the growth rate in the temperature range 550–620 °C shows that the growth can be limited by the reaction kinetics at the surface. Epitaxial layers of good morphological quality have been obtained by reducing the rate of growth even if the growth is limited by the reaction kinetics at the surface. The variation of the electronic mobility with the PH3 molar flux reveals the existence of an optimum mobility region, even with a constant V: III ratio. Photoluminescence experiments carried out on the samples show the good crystallographic quality of the epitaxial layers. Spectra taken in the energy range 0.8–1.2 eV show the evolution of two structures at 0.91 and 1.08 eV that we associate with an antisite PIn and a VIn defect, respectively.[Journal translation]

Pinning of 90° domain boundaries at interface dislocations in BaTiO3/LaAIO3 {100}

1996 ◽  
Vol 54 ◽  
pp. 124-125
Author(s):  
Z.-R. Dai ◽  
Z.L. Wang ◽  
X.F. Duan ◽  
J. Zhang
Keyword(s):  
Thin Films ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Epitaxial Thin Films ◽  
Transmission Electron ◽  
Domain Boundaries ◽  
Potential Applications ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition

Epitaxially grown BaTiO3 thin films have potential applications in microelectronics and integrated photonics. The ferroelectric property of this material is largely determined by the domain structure. It is believed that the structure of the substrate would have profound effect on the quality of BaTiO3 epitaxial thin films. This paper reports our studies on the pinning of 90° domain boundaries at interface dislocations.Epitaxial BaTiO3 thin films were deposited on single crystalline LaAIO3 (100) substrates at 800°C by metal-organic chemical vapor deposition (MOCVD). Cross-section specimens of the films were studied at 200 kV using an JEOL 2010 high-resolution transmission electron microscope (HRTEM).

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