Periodic Structure Formation During Laser Direct-Writing of Palladium Acetate Films: An Optically Regulated Mechanism

1987 ◽  
Vol 101 ◽  
Author(s):  
L. Baufay ◽  
M. E. Gross
Keyword(s):  
Optical Absorption ◽  
Periodic Structure ◽  
Reaction Rate ◽  
Amorphous Semiconductors ◽  
Palladium Acetate ◽  
Complex Relationship ◽  
Direct Writing ◽  
Laser Direct Writing ◽  
Wide Range ◽  
Micron Size

ABSTRACTLaser direct-writing of micron-size metallic features from Pd acetate film precursors is achieved using a scanned cw Ar+ laser. Marked periodic structure is observed in these features under a wide range of exposure conditions. A model based on laser reflectivity and transmittance measurements has been developed to describe the formation of the periodic structure. The model takes into account a complex relationship between optical absorption, laser-induced heating and reaction rate. The decomposition of Pd acetate to metal is endothermic and, therefore, this system differs fundamentally from the “explosive” crystallisation of amorphous semiconductors.

Modelling of Pyrolytic Laser Direct-Writing from Thin Metalorganic Films

1988 ◽  
Vol 129 ◽  
Author(s):  
Peter E. Price ◽  
Klavs F. Jensen
Keyword(s):  
Nonlinear Function ◽  
Steady States ◽  
Palladium Acetate ◽  
Multiple Steady States ◽  
Direct Writing ◽  
Laser Direct Writing ◽  
Laser Crystallization ◽  
Transient Model ◽  
Optical Absorbance ◽  
Element Approach

ABSTRACTA one-dimensional model for pyrolytic laser direct-writing of metal features from thin metalorganic films is presented. The model extends previous results for scanning laser crystallization by including separate but coupled mass and energy balances and allowing for variations in the optical properties and thermal conductivity in the film as it decomposes. A finite element approach is used to obtain solutions to the steady state and transient model forms. The model predicts the existence of multiple steady states for a range of laser powers when the optical absorbance is a nonlinear function of the fractional conversion in the film. These predictions agree qualitatively with multiple steady states that have been observed in direct-writing of palladium features from palladium acetate films. Experimental results that demonstrate multiplicity in the palladium acetate system are presented. The model also predicts the existence of periodic solutions that correspond to the periodic features that have been reported for direct-writing of gold features from organogold films.

Silicon Growth Rate Enhancement Using Trisilane in a Laser Direct-Writing Technique

1995 ◽  
Vol 397 ◽  
Author(s):  
S. Boughaba ◽  
G. Auvert
Keyword(s):  
Surface Temperature ◽  
Gas Pressure ◽  
Direct Writing ◽  
Laser Direct Writing ◽  
Multilayered Structures ◽  
Deposition Rates ◽  
Micron Size ◽  
Ion Laser ◽  
Silicon Growth ◽  
Argon Ion

ABSTRACTAn argon-ion laser based direct-writing technique was used to deposit micron-size silicon lines from the decomposition of silane (SiH4) and trisilane (Si3H8) gases. The substrates used were 0.1 μrn polysilicon/1 μ.m silicon dioxide/<100> monosilicon multilayered structures. The vertical silicon deposition rate was investigated as a function of the laser-induced surface temperature and gas pressure. For temperatures ranging between 1000 and 1410 °C, the pressure was varied in the range 5-250 mbar and 0.1-30 mbar for SiH4 and Si3H8, respectively. For both gases, three growth regimes could be distinguished according to precursor pressure. The deposition rates achieved using trisilane are far higher than those obtained with silane in spite of the use of a reduced gas pressure range. For a laser-induced surface temperature of 1300 °C and a precursor pressure of 10 mbar, the deposition rates achieved using SiH4 and Si3H8 are, respectively, 0.42 and 20 μ.m/s, representing an enhancement factor of 50 with the later.

Three-dimensional sub-wavelength fabrication by integration of additive and subtractive femtosecond-laser direct writing

2013 ◽  
Vol 1499 ◽  
Author(s):  
Wei Xiong ◽  
Yunshen Zhou ◽  
Xiangnan He ◽  
Yang Gao ◽  
Masoud Mahjouri-Samani ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Three Dimensional ◽  
Direct Writing ◽  
Laser Direct Writing ◽  
Nano Fabrication ◽  
Two Photon ◽  
Micro Fluidics ◽  
Wide Range ◽  
Device Structures ◽  
Two Photon Polymerization

ABSTRACTAdditive nanofabrication by two-photon polymerization (TPP) has recently drawn increased attention due to its sub-100 nm resolution and truly three-dimensional (3D) structuring capability. However, besides additive processes, subtractive process is also demanded for many 3D fabrications. Method possessing both additive and subtractive fabrication capabilities was rarely reported. In this study, we developed a complementary 3D micro/nano-fabrication process by integrating both additive two-photon polymerization (TPP) and subtractive multi-photon ablation (MPA) into a single platform of femtosecond-laser direct writing process. Functional device structures were successfully fabricated including: polymer fiber Bragg gratings containing periodic holes of 500-nm diameter and 3D micro-fluidic systems containing arrays of channels of 1-µm diameter. The integration of TPP and MPA processes enhances the nanofabrication efficiency and enables the fabrication of complex 3D micro/nano-structures that are impractical to produce by either TPP or MPA alone, which is promising for a wide range of applications including integrated optics, metamaterials, MEMS, and micro-fluidics.

Laser direct writing of micron‐size silicon lines from trisilane

1995 ◽  
Vol 78 (11) ◽  
pp. 6791-6796 ◽  
Author(s):  
S. Boughaba ◽  
G. Auvert
Keyword(s):  
Direct Writing ◽  
Laser Direct Writing ◽  
Micron Size

Wavelength tunable fiber Bragg gratings fabricated by stress annealing assisted femtosecond laser direct writing

2021 ◽  
Vol 61 ◽  
pp. 102427
Author(s):  
Xiaoyan Sun ◽  
Zikun Chang ◽  
Li Zeng ◽  
Xinran Dong ◽  
Youwang Hu ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Fiber Bragg Gratings ◽  
Bragg Gratings ◽  
Direct Writing ◽  
Laser Direct Writing ◽  
Wavelength Tunable

Micropatterned Cell‐Repellent Interface Using Femtosecond Laser Direct Writing to Engineer Controlled Cell Organization

2021 ◽  
pp. 2100178
Author(s):  
Wenguang Yang ◽  
Honghui Chu ◽  
Shuxiang Cai ◽  
Wenfeng Liang ◽  
Haibo Yu ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Direct Writing ◽  
Laser Direct Writing ◽  
Cell Organization
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