Three-dimensional sub-wavelength fabrication by integration of additive and subtractive femtosecond-laser direct writing

2013 ◽  
Vol 1499 ◽  
Author(s):  
Wei Xiong ◽  
Yunshen Zhou ◽  
Xiangnan He ◽  
Yang Gao ◽  
Masoud Mahjouri-Samani ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Three Dimensional ◽  
Direct Writing ◽  
Laser Direct Writing ◽  
Nano Fabrication ◽  
Two Photon ◽  
Micro Fluidics ◽  
Wide Range ◽  
Device Structures ◽  
Two Photon Polymerization

ABSTRACTAdditive nanofabrication by two-photon polymerization (TPP) has recently drawn increased attention due to its sub-100 nm resolution and truly three-dimensional (3D) structuring capability. However, besides additive processes, subtractive process is also demanded for many 3D fabrications. Method possessing both additive and subtractive fabrication capabilities was rarely reported. In this study, we developed a complementary 3D micro/nano-fabrication process by integrating both additive two-photon polymerization (TPP) and subtractive multi-photon ablation (MPA) into a single platform of femtosecond-laser direct writing process. Functional device structures were successfully fabricated including: polymer fiber Bragg gratings containing periodic holes of 500-nm diameter and 3D micro-fluidic systems containing arrays of channels of 1-µm diameter. The integration of TPP and MPA processes enhances the nanofabrication efficiency and enables the fabrication of complex 3D micro/nano-structures that are impractical to produce by either TPP or MPA alone, which is promising for a wide range of applications including integrated optics, metamaterials, MEMS, and micro-fluidics.

scholarly journals Two-photon polymerization nanolithography technology for fabrication of stimulus-responsive micro/nano-structures for biomedical applications

2020 ◽  
Vol 9 (1) ◽  
pp. 1118-1136
Author(s):  
Zhenjia Huang ◽  
Gary Chi-Pong Tsui ◽  
Yu Deng ◽  
Chak-Yin Tang
Keyword(s):  
Biomedical Applications ◽  
Three Dimensional ◽  
Water Soluble ◽  
Fabrication Technology ◽  
Nano Fabrication ◽  
Two Photon ◽  
Nano Structures ◽  
Wide Range ◽  
Stimulus Responsive ◽  
Two Photon Polymerization

AbstractMicro/nano-fabrication technology via two-photon polymerization (TPP) nanolithography is a powerful and useful manufacturing tool that is capable of generating two dimensional (2D) to three dimensional (3D) arbitrary micro/nano-structures of various materials with a high spatial resolution. This technology has received tremendous interest in cell and tissue engineering and medical microdevices because of its remarkable fabrication capability for sophisticated structures from macro- to nano-scale, which are difficult to be achieved by traditional methods with limited microarchitecture controllability. To fabricate precisely designed 3D micro/nano-structures for biomedical applications via TPP nanolithography, the use of photoinitiators (PIs) and photoresists needs to be considered comprehensively and systematically. In this review, widely used commercially available PIs are first discussed, followed by elucidating synthesis strategies of water-soluble initiators for biomedical applications. In addition to the conventional photoresists, the distinctive properties of customized stimulus-responsive photoresists are discussed. Finally, current limitations and challenges in the material and fabrication aspects and an outlook for future prospects of TPP for biomedical applications based on different biocompatible photosensitive composites are discussed comprehensively. In all, this review provides a basic understanding of TPP technology and important roles of PIs and photoresists for fabricating high-precision stimulus-responsive micro/nano-structures for a wide range of biomedical applications.

scholarly journals Rapid Fabrication of Continuous Surface Fresnel Microlens Array by Femtosecond Laser Focal Field Engineering

Micromachines ◽  
2020 ◽  
Vol 11 (2) ◽  
pp. 112 ◽  
Author(s):  
Linyu Yan ◽  
Dong Yang ◽  
Qihuang Gong ◽  
Yan Li
Keyword(s):  
Femtosecond Laser ◽  
Three Dimensional ◽  
Fresnel Lens ◽  
Two Dimensional ◽  
Direct Writing ◽  
Lens Array ◽  
Two Photon ◽  
Rapid Fabrication ◽  
Continuous Surface ◽  
Two Photon Polymerization

Femtosecond laser direct writing through two-photon polymerization has been widely used in precision fabrication of three-dimensional microstructures but is usually time consuming. In this article, we report the rapid fabrication of continuous surface Fresnel lens array through femtosecond laser three-dimensional focal field engineering. Each Fresnel lens is formed by continuous two-photon polymerization of the two-dimensional slices of the whole structure with one-dimensional scan of the corresponding two-dimensional engineered intensity distribution. Moreover, we anneal the lens array to improve its focusing and imaging performance.

scholarly journals Advanced Micro-Actuator/Robot Fabrication Using Ultrafast Laser Direct Writing and Its Remote Control

2020 ◽  
Vol 10 (23) ◽  
pp. 8563
Author(s):  
Sangmo Koo
Keyword(s):  
Three Dimensional ◽  
Processing Technique ◽  
Direct Writing ◽  
Laser Direct Writing ◽  
Precise Control ◽  
Two Photon ◽  
Non Invasive ◽  
Acoustic Control ◽  
Fs Laser ◽  
Invasive Control

Two-photon polymerization (TPP) based on the femtosecond laser (fs laser) direct writing technique in the realization of high-resolution three-dimensional (3D) shapes is spotlighted as a unique and promising processing technique. It is also interesting that TPP can be applied to various applications in not only optics, chemistry, physics, biomedical engineering, and microfluidics but also micro-robotics systems. Effort has been made to design innovative microscale actuators, and research on how to remotely manipulate actuators is also constantly being conducted. Various manipulation methods have been devised including the magnetic, optical, and acoustic control of microscale actuators, demonstrating the great potential for non-contact and non-invasive control. However, research related to the precise control of microscale actuators is still in the early stages, and in-depth research is needed for the efficient control and diversification of a range of applications. In the future, the combination of the fs laser-based fabrication technique for the precise fabrication of microscale actuators/robots and their manipulation can be established as a next-generation processing method by presenting the possibility of applications to various areas.

Three-dimensional staggered herringbone mixer fabricated by femtosecond laser direct writing

2013 ◽  
Vol 15 (2) ◽  
pp. 025601 ◽  
Author(s):  
Di Lin ◽  
Fei He ◽  
Yang Liao ◽  
Jintian Lin ◽  
Changning Liu ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Three Dimensional ◽  
Direct Writing ◽  
Laser Direct Writing

Rapid prototyping of three-dimensional microfluidic mixers in glass by femtosecond laser direct writing

Lab on a Chip ◽  
2012 ◽  
Vol 12 (4) ◽  
pp. 746 ◽  
Author(s):  
Yang Liao ◽  
Jiangxin Song ◽  
En Li ◽  
Yong Luo ◽  
Yinglong Shen ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Rapid Prototyping ◽  
Three Dimensional ◽  
Direct Writing ◽  
Laser Direct Writing ◽  
Microfluidic Mixers

scholarly journals Three-Dimensional Microfabrication With Conjugated Polymers

2008 ◽  
Vol 5 (1) ◽  
pp. 101-106
Author(s):  
Baghdad Science Journal
Keyword(s):  
Femtosecond Laser ◽  
Conjugated Polymers ◽  
Three Dimensional ◽  
Acrylic Resin ◽  
Two Photon ◽  
Two Photon Polymerization

In this paper we reported the microfabrication of three-dimensional structures using two-photon polymerization (2PP) in a mixture of MEH-PPV and an acrylic resin. Femtosecond laser operating at 800nm was employed for the two-photon polymerization processes. As a first step in this project we obtained the better composition in order to fabricate microstructers of MEH-PPV in the resin via two-photon polymerzation. Acknowledgement:This research is support by Mazur Group, Harvrad Universirt.

Sign in / Sign up

Export Citation Format

Share Document