Laser direct writing of micron‐size silicon lines from trisilane

1995 ◽  
Vol 78 (11) ◽  
pp. 6791-6796 ◽  
Author(s):  
S. Boughaba ◽  
G. Auvert
Keyword(s):  
Direct Writing ◽  
Laser Direct Writing ◽  
Micron Size

Silicon Growth Rate Enhancement Using Trisilane in a Laser Direct-Writing Technique

1995 ◽  
Vol 397 ◽  
Author(s):  
S. Boughaba ◽  
G. Auvert
Keyword(s):  
Surface Temperature ◽  
Gas Pressure ◽  
Direct Writing ◽  
Laser Direct Writing ◽  
Multilayered Structures ◽  
Deposition Rates ◽  
Micron Size ◽  
Ion Laser ◽  
Silicon Growth ◽  
Argon Ion

ABSTRACTAn argon-ion laser based direct-writing technique was used to deposit micron-size silicon lines from the decomposition of silane (SiH4) and trisilane (Si3H8) gases. The substrates used were 0.1 μrn polysilicon/1 μ.m silicon dioxide/<100> monosilicon multilayered structures. The vertical silicon deposition rate was investigated as a function of the laser-induced surface temperature and gas pressure. For temperatures ranging between 1000 and 1410 °C, the pressure was varied in the range 5-250 mbar and 0.1-30 mbar for SiH4 and Si3H8, respectively. For both gases, three growth regimes could be distinguished according to precursor pressure. The deposition rates achieved using trisilane are far higher than those obtained with silane in spite of the use of a reduced gas pressure range. For a laser-induced surface temperature of 1300 °C and a precursor pressure of 10 mbar, the deposition rates achieved using SiH4 and Si3H8 are, respectively, 0.42 and 20 μ.m/s, representing an enhancement factor of 50 with the later.

Periodic Structure Formation During Laser Direct-Writing of Palladium Acetate Films: An Optically Regulated Mechanism

1987 ◽  
Vol 101 ◽  
Author(s):  
L. Baufay ◽  
M. E. Gross
Keyword(s):  
Optical Absorption ◽  
Periodic Structure ◽  
Reaction Rate ◽  
Amorphous Semiconductors ◽  
Palladium Acetate ◽  
Complex Relationship ◽  
Direct Writing ◽  
Laser Direct Writing ◽  
Wide Range ◽  
Micron Size

ABSTRACTLaser direct-writing of micron-size metallic features from Pd acetate film precursors is achieved using a scanned cw Ar+ laser. Marked periodic structure is observed in these features under a wide range of exposure conditions. A model based on laser reflectivity and transmittance measurements has been developed to describe the formation of the periodic structure. The model takes into account a complex relationship between optical absorption, laser-induced heating and reaction rate. The decomposition of Pd acetate to metal is endothermic and, therefore, this system differs fundamentally from the “explosive” crystallisation of amorphous semiconductors.

Wavelength tunable fiber Bragg gratings fabricated by stress annealing assisted femtosecond laser direct writing

2021 ◽  
Vol 61 ◽  
pp. 102427
Author(s):  
Xiaoyan Sun ◽  
Zikun Chang ◽  
Li Zeng ◽  
Xinran Dong ◽  
Youwang Hu ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Fiber Bragg Gratings ◽  
Bragg Gratings ◽  
Direct Writing ◽  
Laser Direct Writing ◽  
Wavelength Tunable

Micropatterned Cell‐Repellent Interface Using Femtosecond Laser Direct Writing to Engineer Controlled Cell Organization

2021 ◽  
pp. 2100178
Author(s):  
Wenguang Yang ◽  
Honghui Chu ◽  
Shuxiang Cai ◽  
Wenfeng Liang ◽  
Haibo Yu ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Direct Writing ◽  
Laser Direct Writing ◽  
Cell Organization

scholarly journals Advanced Micro-Actuator/Robot Fabrication Using Ultrafast Laser Direct Writing and Its Remote Control

2020 ◽  
Vol 10 (23) ◽  
pp. 8563
Author(s):  
Sangmo Koo
Keyword(s):  
Three Dimensional ◽  
Processing Technique ◽  
Direct Writing ◽  
Laser Direct Writing ◽  
Precise Control ◽  
Two Photon ◽  
Non Invasive ◽  
Acoustic Control ◽  
Fs Laser ◽  
Invasive Control

Two-photon polymerization (TPP) based on the femtosecond laser (fs laser) direct writing technique in the realization of high-resolution three-dimensional (3D) shapes is spotlighted as a unique and promising processing technique. It is also interesting that TPP can be applied to various applications in not only optics, chemistry, physics, biomedical engineering, and microfluidics but also micro-robotics systems. Effort has been made to design innovative microscale actuators, and research on how to remotely manipulate actuators is also constantly being conducted. Various manipulation methods have been devised including the magnetic, optical, and acoustic control of microscale actuators, demonstrating the great potential for non-contact and non-invasive control. However, research related to the precise control of microscale actuators is still in the early stages, and in-depth research is needed for the efficient control and diversification of a range of applications. In the future, the combination of the fs laser-based fabrication technique for the precise fabrication of microscale actuators/robots and their manipulation can be established as a next-generation processing method by presenting the possibility of applications to various areas.

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