Flexible surface acoustic wave devices and its applications in microfluidics

2014 ◽  
Vol 1659 ◽  
pp. 27-33
Author(s):  
Jian Zhou ◽  
Xingli He ◽  
Wenbo Wang ◽  
Nana Hu ◽  
Hao Jin ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Flexible Electronics ◽  
Lamb Waves ◽  
Acoustic Streaming ◽  
Plastic Films ◽  
Saw Devices ◽  
Flexible Surface ◽  
Developed Surface ◽  
Acoustic Wave Devices

Abstract:Flexible electronics and microsystems are an emerging technology with a tremedous impact to the future electronics and information technology and widespread applications. Various devices and microsystems have been developed. Surface acoustic wave (SAW) devices are a type of essential device for electronics, microsensors and microsystems; however there is no activity on the development of flexible SAW devices yet. This paper reports the development of flexible SAW devices on cheap, bendable and disposable plastic films. Flexible SAW devices with resonant frequency of 198.1 MHz and 447 MHz for the Rayleigh and Lamb waves respectively have been obtained with a large transmission signal up to 18dB. The flexible SAW devices have also demonstrated their ability for acoustic streaming with a velocity up to 3.4 cm/s and for particle concentration. The results have clearly demonstrated that the flexible SAW devices have great potential for applications in electronics and microsystems.

Flexible Surface Acoustic Wave Based Temperature and Humidity Sensors

2014 ◽  
Vol 1659 ◽  
pp. 75-80 ◽  
Author(s):  
X.L. He ◽  
J. Zhou ◽  
W.B. Wang ◽  
W.P. Xuan ◽  
D.J. Li ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Lamb Waves ◽  
High Sensitivity ◽  
Zno Films ◽  
Humidity Sensors ◽  
Saw Devices ◽  
Flexible Surface ◽  
Temperature And Humidity ◽  
Temperature Coefficient Of Frequency

ABSTRACTFlexible surface acoustic wave (SAW) based temperature and humidity sensors were fabricated and characterized. ZnO piezoelectric films were deposited on polyimide substrates by DC magnetron sputtering. ZnO films possess (0002) crystal orientation with large grain sizes of 50∼70 nm. SAW devices showed two wave modes, namely the Rayleigh and Lamb modes, with the frequencies at fR ∼132MHz and fL∼427MHz respectively for a wavelength of 12 μm device. The two resonant frequencies have a temperature coefficient of frequency (TCF) of −423ppm/K and −258ppm/K for the Rayleigh and Lamb waves, respectively. The SAW sensors exhibited a good repeatability in responding to cyclic change of humidity. The responses of the sensors increase with the increase in humidity, and the sensitivity increases with the decrease in wavelength. A high sensitivity of 34.7 kHz/10%RH has been obtained from a SAW device without any surface treatment, demonstrated that the flexible SAW humidity sensors are very promising for application in flexible sensors and microsystems.

scholarly journals Flexible thin-film acoustic wave devices with off-axis bending characteristics for multisensing applications

2021 ◽  
Vol 7 (1) ◽  
Author(s):  
Zhangbin Ji ◽  
Jian Zhou ◽  
Huamao Lin ◽  
Jianhui Wu ◽  
Dinghong Zhang ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Flexible Electronics ◽  
Wave Equations ◽  
Uv Light ◽  
Theoretical Calculations ◽  
Complex Deformation ◽  
Widespread Application ◽  
Glass Substrates ◽  
Saw Devices ◽  
Acoustic Wave Devices

AbstractFlexible surface acoustic wave (SAW) devices have recently attracted tremendous attention for their widespread application in sensing and microfluidics. However, for these applications, SAW devices often need to be bent into off-axis deformations between the acoustic wave propagation direction and bending direction. Currently, there are few studies on this topic, and the bending mechanisms during off-axis bending deformations have remained unexplored for multisensing applications. Herein, we fabricated aluminum nitride (AlN) flexible SAW devices by using high-quality AlN films deposited on flexible glass substrates and systematically investigated their complex deformation behaviors. A theoretical model was first developed using coupling wave equations and the boundary condition method to analyze the characteristics of the device with bending and off-axis deformation under elastic strains. The relationships between the frequency shifts of the SAW device and the bending strain and off-axis angle were obtained, and the results were identical to those from the theoretical calculations. Finally, we performed proof-of-concept demonstrations of its multisensing potential by monitoring human wrist movements at various off-axis angles and detecting UV light intensities on a curved surface, thus paving the way for the application of versatile flexible electronics.

Growth and Characterization of Polyimide-Supported AlN Films for Flexible Surface Acoustic Wave Devices

2016 ◽  
Vol 45 (6) ◽  
pp. 2702-2709 ◽  
Author(s):  
Qi Li ◽  
Hongyan Liu ◽  
Gen Li ◽  
Fei Zeng ◽  
Feng Pan ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Flexible Surface ◽  
Acoustic Wave Devices

scholarly journals Flexible Surface Acoustic Wave Device with AlN Film on Polymer Substrate

2012 ◽  
Vol 2012 ◽  
pp. 1-5 ◽  
Author(s):  
Jian Zhou ◽  
Shurong Dong ◽  
Hao Jin ◽  
Bing Feng ◽  
Demiao Wang
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Polymer Substrates ◽  
Lab On Chip ◽  
Flexible Surface ◽  
Aln Film ◽  
Surface Acoustic Wave Device ◽  
Acoustic Wave Devices ◽  
Acoustic Wave Device ◽  
Wave Device

Surface acoustic wave device withc-axis-oriented aluminum nitride (AlN) piezoelectric thin films on polymer substrates can be potentially used for development of flexible sensors, flexible microfluidic applications, microsystems, and lab-on-chip systems. In this work, the AlN films have been successfully deposited on polymer substrates using the DC reactive magnetron-sputtering method at room temperature, and the XRD, SEM, and AFM methods reveal that low deposition pressure is beneficial to the highlyc-axis-oriented AlN film on polymer substrates. Studies toward the development of AlN thin film-based flexible surface acoustic wave devices on the polymer substrates are initiated and the experimental and simulated results demonstrate the devices showing the acoustic wave velocity of 9000–10000 m/s, which indicate the AlN lamb wave.

scholarly journals State of the Art in Design and Technology of SAW Devices

1980 ◽  
Vol 6 (3-4) ◽  
pp. 199-204
Author(s):  
P. E. Lagasse
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
State Of The Art ◽  
The State ◽  
Design And Technology ◽  
Saw Devices ◽  
Acoustic Wave Devices

In this paper the different classes of surface acoustic wave devices are briefly reviewed and examples of the state of the art are given. The fabrication techniques and the application of SAW components are also discussed.

Characterization of Group III-Nitride Based Surface Acoustic Wave Devices for High Temperature Applications

2011 ◽  
Vol 1299 ◽  
Author(s):  
J. Justice ◽  
L.E. Rodak ◽  
V. Narang ◽  
K. Lee ◽  
L.A. Hornak ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Harmonic Excitation ◽  
Scattering Parameter ◽  
Group Iii ◽  
Saw Devices ◽  
Before And After ◽  
Metal Organic ◽  
Acoustic Wave Devices ◽  
Group Iii Nitride

ABSTRACTIn this study, aluminum nitride (AlN) and gallium nitride (GaN) thin films have been grown via metal organic vapor phase epitaxy (MOVPE) on silicon and sapphire substrates. Samples were annealed at temperatures ranging from 450 to 1000 °C in atmosphere. AlN and GaN thin film quality has been characterized before and after annealing using scanning electron microscopy (SEM), energy dispersive X-ray spectroscopy (EDS) and atomic force microscopy (AFM). Surface acoustic wave (SAW) devices with titanium/platinum interdigital transducers (IDTs) designed to operate at the characteristic frequency and fifth harmonic have been realized using traditional optical photolithographic processes. SAW devices on GaN were thermally cycled from 450 to 850 °C. The S21 scattering parameter of SAW devices was measured before and after thermal cycling by a vector network analyzer (VNA). An approach for the suppression of electromagnetic feedthrough (EF) to improve device performance is discussed. Feasibility of 5th harmonic excitation for GHz operation without sub-micron fabrication is also investigated. SAW devices have also been fabricated on the more traditional SAW substrate, lithium niobate (LiNbO3), and device response was compared with those on AlN and GaN at room temperature.

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