High sensitivity humidity sensors using flexible surface acoustic wave devices made on nanocrystalline ZnO/polyimide substrates

2013 ◽  
Vol 1 (39) ◽  
pp. 6210 ◽  
Author(s):  
X. L. He ◽  
D. J. Li ◽  
J. Zhou ◽  
W. B. Wang ◽  
W. P. Xuan ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
High Sensitivity ◽  
Humidity Sensors ◽  
Flexible Surface ◽  
Acoustic Wave Devices

Flexible Surface Acoustic Wave Based Temperature and Humidity Sensors

2014 ◽  
Vol 1659 ◽  
pp. 75-80 ◽  
Author(s):  
X.L. He ◽  
J. Zhou ◽  
W.B. Wang ◽  
W.P. Xuan ◽  
D.J. Li ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Lamb Waves ◽  
High Sensitivity ◽  
Zno Films ◽  
Humidity Sensors ◽  
Saw Devices ◽  
Flexible Surface ◽  
Temperature And Humidity ◽  
Temperature Coefficient Of Frequency

ABSTRACTFlexible surface acoustic wave (SAW) based temperature and humidity sensors were fabricated and characterized. ZnO piezoelectric films were deposited on polyimide substrates by DC magnetron sputtering. ZnO films possess (0002) crystal orientation with large grain sizes of 50∼70 nm. SAW devices showed two wave modes, namely the Rayleigh and Lamb modes, with the frequencies at fR ∼132MHz and fL∼427MHz respectively for a wavelength of 12 μm device. The two resonant frequencies have a temperature coefficient of frequency (TCF) of −423ppm/K and −258ppm/K for the Rayleigh and Lamb waves, respectively. The SAW sensors exhibited a good repeatability in responding to cyclic change of humidity. The responses of the sensors increase with the increase in humidity, and the sensitivity increases with the decrease in wavelength. A high sensitivity of 34.7 kHz/10%RH has been obtained from a SAW device without any surface treatment, demonstrated that the flexible SAW humidity sensors are very promising for application in flexible sensors and microsystems.

Flexible surface acoustic wave devices and its applications in microfluidics

2014 ◽  
Vol 1659 ◽  
pp. 27-33
Author(s):  
Jian Zhou ◽  
Xingli He ◽  
Wenbo Wang ◽  
Nana Hu ◽  
Hao Jin ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Flexible Electronics ◽  
Lamb Waves ◽  
Acoustic Streaming ◽  
Plastic Films ◽  
Saw Devices ◽  
Flexible Surface ◽  
Developed Surface ◽  
Acoustic Wave Devices

Abstract:Flexible electronics and microsystems are an emerging technology with a tremedous impact to the future electronics and information technology and widespread applications. Various devices and microsystems have been developed. Surface acoustic wave (SAW) devices are a type of essential device for electronics, microsensors and microsystems; however there is no activity on the development of flexible SAW devices yet. This paper reports the development of flexible SAW devices on cheap, bendable and disposable plastic films. Flexible SAW devices with resonant frequency of 198.1 MHz and 447 MHz for the Rayleigh and Lamb waves respectively have been obtained with a large transmission signal up to 18dB. The flexible SAW devices have also demonstrated their ability for acoustic streaming with a velocity up to 3.4 cm/s and for particle concentration. The results have clearly demonstrated that the flexible SAW devices have great potential for applications in electronics and microsystems.

Growth and Characterization of Polyimide-Supported AlN Films for Flexible Surface Acoustic Wave Devices

2016 ◽  
Vol 45 (6) ◽  
pp. 2702-2709 ◽  
Author(s):  
Qi Li ◽  
Hongyan Liu ◽  
Gen Li ◽  
Fei Zeng ◽  
Feng Pan ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Flexible Surface ◽  
Acoustic Wave Devices

scholarly journals Love-mode surface acoustic wave devices based on multilayers of TeO2/ZnO(112¯0)/Si(1 0 0) with high sensitivity and temperature stability

Ultrasonics ◽  
2017 ◽  
Vol 75 ◽  
pp. 63-70 ◽  
Author(s):  
Jing-Ting Luo ◽  
Ao-Jie Quan ◽  
Guang-Xing Liang ◽  
Zhuang-Hao Zheng ◽  
Sami Ramadan ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Temperature Stability ◽  
High Sensitivity ◽  
Acoustic Wave Devices

scholarly journals Flexible Surface Acoustic Wave Device with AlN Film on Polymer Substrate

2012 ◽  
Vol 2012 ◽  
pp. 1-5 ◽  
Author(s):  
Jian Zhou ◽  
Shurong Dong ◽  
Hao Jin ◽  
Bing Feng ◽  
Demiao Wang
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Polymer Substrates ◽  
Lab On Chip ◽  
Flexible Surface ◽  
Aln Film ◽  
Surface Acoustic Wave Device ◽  
Acoustic Wave Devices ◽  
Acoustic Wave Device ◽  
Wave Device

Surface acoustic wave device withc-axis-oriented aluminum nitride (AlN) piezoelectric thin films on polymer substrates can be potentially used for development of flexible sensors, flexible microfluidic applications, microsystems, and lab-on-chip systems. In this work, the AlN films have been successfully deposited on polymer substrates using the DC reactive magnetron-sputtering method at room temperature, and the XRD, SEM, and AFM methods reveal that low deposition pressure is beneficial to the highlyc-axis-oriented AlN film on polymer substrates. Studies toward the development of AlN thin film-based flexible surface acoustic wave devices on the polymer substrates are initiated and the experimental and simulated results demonstrate the devices showing the acoustic wave velocity of 9000–10000 m/s, which indicate the AlN lamb wave.

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