Flexible Surface Acoustic Wave Based Temperature and Humidity Sensors

2014 ◽  
Vol 1659 ◽  
pp. 75-80 ◽  
Author(s):  
X.L. He ◽  
J. Zhou ◽  
W.B. Wang ◽  
W.P. Xuan ◽  
D.J. Li ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Lamb Waves ◽  
High Sensitivity ◽  
Zno Films ◽  
Humidity Sensors ◽  
Saw Devices ◽  
Flexible Surface ◽  
Temperature And Humidity ◽  
Temperature Coefficient Of Frequency

ABSTRACTFlexible surface acoustic wave (SAW) based temperature and humidity sensors were fabricated and characterized. ZnO piezoelectric films were deposited on polyimide substrates by DC magnetron sputtering. ZnO films possess (0002) crystal orientation with large grain sizes of 50∼70 nm. SAW devices showed two wave modes, namely the Rayleigh and Lamb modes, with the frequencies at fR ∼132MHz and fL∼427MHz respectively for a wavelength of 12 μm device. The two resonant frequencies have a temperature coefficient of frequency (TCF) of −423ppm/K and −258ppm/K for the Rayleigh and Lamb waves, respectively. The SAW sensors exhibited a good repeatability in responding to cyclic change of humidity. The responses of the sensors increase with the increase in humidity, and the sensitivity increases with the decrease in wavelength. A high sensitivity of 34.7 kHz/10%RH has been obtained from a SAW device without any surface treatment, demonstrated that the flexible SAW humidity sensors are very promising for application in flexible sensors and microsystems.

Flexible surface acoustic wave devices and its applications in microfluidics

2014 ◽  
Vol 1659 ◽  
pp. 27-33
Author(s):  
Jian Zhou ◽  
Xingli He ◽  
Wenbo Wang ◽  
Nana Hu ◽  
Hao Jin ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Flexible Electronics ◽  
Lamb Waves ◽  
Acoustic Streaming ◽  
Plastic Films ◽  
Saw Devices ◽  
Flexible Surface ◽  
Developed Surface ◽  
Acoustic Wave Devices

Abstract:Flexible electronics and microsystems are an emerging technology with a tremedous impact to the future electronics and information technology and widespread applications. Various devices and microsystems have been developed. Surface acoustic wave (SAW) devices are a type of essential device for electronics, microsensors and microsystems; however there is no activity on the development of flexible SAW devices yet. This paper reports the development of flexible SAW devices on cheap, bendable and disposable plastic films. Flexible SAW devices with resonant frequency of 198.1 MHz and 447 MHz for the Rayleigh and Lamb waves respectively have been obtained with a large transmission signal up to 18dB. The flexible SAW devices have also demonstrated their ability for acoustic streaming with a velocity up to 3.4 cm/s and for particle concentration. The results have clearly demonstrated that the flexible SAW devices have great potential for applications in electronics and microsystems.

High Harmonic Surface Acoustic Wave Devices for Harsh Environment Sensor Applications

2013 ◽  
Vol 1519 ◽  
Author(s):  
J. Justice ◽  
M. Elbaz ◽  
L. E. Rodak ◽  
D. Korakakis
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Low Cost ◽  
High Harmonic ◽  
High Sensitivity ◽  
Harsh Environments ◽  
Device Performance ◽  
Quality Factors ◽  
Vehicle Exhaust ◽  
Saw Devices

ABSTRACTSurface acoustic wave (SAW) devices are ideal candidates for gas sensors due to their small size, low cost of production and high sensitivity. Increasing restrictions on pollution and emissions create the necessity for sensors that can operate in the harsh environments found in vehicle exhaust systems and industrial production. Gallium nitride (GaN) is a robust, chemically inert, piezoelectric semiconductor, making it an attractive material for SAW devices designed to detect and monitor gases in harsh environments. In this work, SAW devices designed to operate at the 5th and 7th harmonics are fabricated on GaN thin films and their performance is measured through insertion loss, signal to noise ratio, operating frequency and quality factor. Devices are directly exposed to the exhaust gas of a common diesel engine. Device performance is then re-measured and compared. SAW devices fabricated in this work have measured operating frequencies above 1 GHz, and quality factors up to and higher than 2000, depending on the harmonic mode. SAW devices on GaN showed good chemical stability and measured changes in device performance after exhaust exposure was negligible.

scholarly journals On the Performance Evaluation of Commercial SAW Resonators by Means of a Direct and Reliable Equivalent-Circuit Extraction

Micromachines ◽  
2021 ◽  
Vol 12 (3) ◽  
pp. 303
Author(s):  
Giovanni Gugliandolo ◽  
Zlatica Marinković ◽  
Giuseppe Campobello ◽  
Giovanni Crupi ◽  
Nicola Donato
Keyword(s):  
Performance Evaluation ◽  
Acoustic Wave ◽  
Equivalent Circuit ◽  
Surface Acoustic Wave ◽  
Equivalent Circuit Model ◽  
Practical Applications ◽  
Saw Devices ◽  
S Parameter ◽  
Commercial Device ◽  
Saw Resonators

Nowadays, surface acoustic wave (SAW) resonators are attracting growing attention, owing to their widespread applications in various engineering fields, such as electronic, telecommunication, automotive, chemical, and biomedical engineering. A thorough assessment of SAW performance is a key task for bridging the gap between commercial SAW devices and practical applications. To contribute to the accomplishment of this crucial task, the present paper reports the findings of a new comparative study that is based on the performance evaluation of different commercial SAW resonators by using scattering (S-) parameter measurements coupled with a Lorentzian fitting and an accurate modelling technique for the straightforward extraction of a lumped-element equivalent-circuit representation. The developed investigation thus provides ease and reliability when choosing the appropriate commercial device, depending on the requirements and constraints of the given sensing application. This paper deals with the performance evaluation of commercial surface acoustic wave (SAW) resonators by means of scattering (S-) parameter measurements and an equivalent-circuit model extracted using a reliable modeling procedure. The studied devices are four TO-39 packaged two-port resonators with different nominal operating frequencies: 418.05, 423.22, 433.92, and 915 MHz. The S-parameter characterization was performed locally around the resonant frequencies of the tested SAW resonators by using an 8753ES Agilent vector network analyzer (VNA) and a home-made calibration kit. The reported measurement-based study has allowed for the development of a comprehensive and detailed comparative analysis of the performance of the investigated SAW devices. The characterization and modelling procedures are fully automated with a user-friendly graphical user interface (GUI) developed in the Python environment, thereby making the experimental analysis faster and more efficient.

Low loss surface acoustic wave SAW devices based on Al1-xMxN (M=Cr, Y, Sc) thin films

2021 ◽  
pp. 412990
Author(s):  
Saad Amara ◽  
Fares Kanouni ◽  
Farouk Laidoudi ◽  
Khaled Bouamama
Keyword(s):  
Thin Films ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Low Loss ◽  
Saw Devices

A high sensitivity wireless mass-loading surface acoustic wave DNA biosensor

2014 ◽  
Vol 28 (07) ◽  
pp. 1450056 ◽  
Author(s):  
Hua-Lin Cai ◽  
Yi Yang ◽  
Yi-Han Zhang ◽  
Chang-Jian Zhou ◽  
Cang-Ran Guo ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Dna Sequences ◽  
Biological Treatment ◽  
High Performance ◽  
Processing System ◽  
High Sensitivity ◽  
Treatment Method ◽  
Saw Sensor ◽  
Target Dna

In this paper, a surface acoustic wave (SAW) biosensor with gold delay area on LiNbO 3 substrate detecting DNA sequences is proposed. By well-designed device parameters of the SAW sensor, it achieves a high performance for highly sensitive detection of target DNA. In addition, an effective biological treatment method for DNA immobilization and abundant experimental verification of the sensing effect have made it a reliable device in DNA detection. The loading mass of the probe and target DNA sequences is obtained from the frequency shifts, which are big enough in this work due to an effective biological treatment. The experimental results show that the biosensor has a high sensitivity of 1.2 pg/ml/Hz and high selectivity characteristic is also verified by the few responses of other substances. In combination with wireless transceiver, we develop a wireless receiving and processing system that can directly display the detection results.

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