scholarly journals State of the Art in Design and Technology of SAW Devices

1980 ◽  
Vol 6 (3-4) ◽  
pp. 199-204
Author(s):  
P. E. Lagasse
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
State Of The Art ◽  
The State ◽  
Design And Technology ◽  
Saw Devices ◽  
Acoustic Wave Devices

In this paper the different classes of surface acoustic wave devices are briefly reviewed and examples of the state of the art are given. The fabrication techniques and the application of SAW components are also discussed.

Flexible surface acoustic wave devices and its applications in microfluidics

2014 ◽  
Vol 1659 ◽  
pp. 27-33
Author(s):  
Jian Zhou ◽  
Xingli He ◽  
Wenbo Wang ◽  
Nana Hu ◽  
Hao Jin ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Flexible Electronics ◽  
Lamb Waves ◽  
Acoustic Streaming ◽  
Plastic Films ◽  
Saw Devices ◽  
Flexible Surface ◽  
Developed Surface ◽  
Acoustic Wave Devices

Abstract:Flexible electronics and microsystems are an emerging technology with a tremedous impact to the future electronics and information technology and widespread applications. Various devices and microsystems have been developed. Surface acoustic wave (SAW) devices are a type of essential device for electronics, microsensors and microsystems; however there is no activity on the development of flexible SAW devices yet. This paper reports the development of flexible SAW devices on cheap, bendable and disposable plastic films. Flexible SAW devices with resonant frequency of 198.1 MHz and 447 MHz for the Rayleigh and Lamb waves respectively have been obtained with a large transmission signal up to 18dB. The flexible SAW devices have also demonstrated their ability for acoustic streaming with a velocity up to 3.4 cm/s and for particle concentration. The results have clearly demonstrated that the flexible SAW devices have great potential for applications in electronics and microsystems.

Characterization of Group III-Nitride Based Surface Acoustic Wave Devices for High Temperature Applications

2011 ◽  
Vol 1299 ◽  
Author(s):  
J. Justice ◽  
L.E. Rodak ◽  
V. Narang ◽  
K. Lee ◽  
L.A. Hornak ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Harmonic Excitation ◽  
Scattering Parameter ◽  
Group Iii ◽  
Saw Devices ◽  
Before And After ◽  
Metal Organic ◽  
Acoustic Wave Devices ◽  
Group Iii Nitride

ABSTRACTIn this study, aluminum nitride (AlN) and gallium nitride (GaN) thin films have been grown via metal organic vapor phase epitaxy (MOVPE) on silicon and sapphire substrates. Samples were annealed at temperatures ranging from 450 to 1000 °C in atmosphere. AlN and GaN thin film quality has been characterized before and after annealing using scanning electron microscopy (SEM), energy dispersive X-ray spectroscopy (EDS) and atomic force microscopy (AFM). Surface acoustic wave (SAW) devices with titanium/platinum interdigital transducers (IDTs) designed to operate at the characteristic frequency and fifth harmonic have been realized using traditional optical photolithographic processes. SAW devices on GaN were thermally cycled from 450 to 850 °C. The S21 scattering parameter of SAW devices was measured before and after thermal cycling by a vector network analyzer (VNA). An approach for the suppression of electromagnetic feedthrough (EF) to improve device performance is discussed. Feasibility of 5th harmonic excitation for GHz operation without sub-micron fabrication is also investigated. SAW devices have also been fabricated on the more traditional SAW substrate, lithium niobate (LiNbO3), and device response was compared with those on AlN and GaN at room temperature.

scholarly journals Stability studies of ZnO and AlN thin film acoustic wave devices in acid and alkali harsh environments

RSC Advances ◽  
2020 ◽  
Vol 10 (33) ◽  
pp. 19178-19184
Author(s):  
Shuo Xiong ◽  
Xudong Liu ◽  
Jian Zhou ◽  
Yi Liu ◽  
Yiping Shen ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Lab On A Chip ◽  
Harsh Environments ◽  
Stability Studies ◽  
Piezoelectric Thin Films ◽  
Saw Devices ◽  
Acoustic Wave Devices

Surface acoustic wave (SAW) devices based on piezoelectric thin-films such as ZnO and AlN are widely used in sensing, microfluidics and lab-on-a-chip applications.

Surface Acoustic Wave Devices: Materials Stability in Harsh Environments

2012 ◽  
Vol 1519 ◽  
Author(s):  
Denny Richter ◽  
Michal Schulz ◽  
Sergey Sakharov ◽  
Zachary J. Davis ◽  
Holger Fritze
Keyword(s):  
High Temperature ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Harsh Environments ◽  
Platinum Electrodes ◽  
Saw Devices ◽  
Passivation Layers ◽  
Acoustic Wave Devices ◽  
Gallium Content ◽  
The Stability

ABSTRACTThe availability of high-temperature stable surface acoustic wave (SAW) devices would enable realization of wireless sensors for monitoring high-temperature processes. One of the most promising substrate materials for SAW based high-temperature sensors is langasite (LGS, La3Ga5SiO14). It can be excited piezoelectrically up to its melting point at 1470 °C. However, gallium evaporation and degradation of the electrodes limit the application of LGS in SAW sensors for harsh environments to some extent.The objectives of this work include the investigation of the gallium loss in the vicinity of the langasite surface in oxidizing, reducing and vacuum conditions at temperatures up to 900 °C. The gallium content in the vicinity of the LGS surface is not decreased after annealing the samples in air, while a significant gallium loss occurs in vacuum and reducing atmospheres (0.5 % H2/Ar). The latter results in a gallium oxide deficient region of 1.5 μm below the surface after annealing for 12 hours at 900 °C. The gallium loss is virtually completely suppressed after protecting the surface with a thin alumina film.Further, thin-film electrodes based on platinum and platinum/rhodium are tested. While conventional platinum based electrodes are completely destroyed at 900 °C within hours due to agglomeration, alumina protected electrodes can be operated at least for several days at this temperature. After 400 hours at 700 °C, the alumina protected platinum electrodes show insignificant degradation. The influence of alumina passivation layers on the stability of the SAW devices is examined. Different electrode configurations are tested with respect to their long-term frequency stability at 650 °C.

COUPLING-OF-MODES ANALYSIS OF SAW DEVICES

2000 ◽  
Vol 10 (04) ◽  
pp. 867-947 ◽  
Author(s):  
VICTOR PLESSKY ◽  
JULIUS KOSKELA
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Transverse Wave ◽  
Saw Devices ◽  
Acoustic Wave Devices ◽  
Theoretical Simulations ◽  
Resonator Filters

The coupling-of-modes approach for modeling and analyzing surface-acoustic wave devices is reviewed. We discuss the established formalism and survey the modifications introduced to account for phenomena such as resistivity, dispersion and in particular, the effects related to surface transverse wave and leaky surface-acoustic wave devices. The extraction of the COM parameters from experiments and theoretical simulations are considered. The design of various SAW devices such as resonators and resonator filters as well as practical aspects are discussed. Finally, the unresolved modeling problems are addressed.

scholarly journals On the Performance Evaluation of Commercial SAW Resonators by Means of a Direct and Reliable Equivalent-Circuit Extraction

Micromachines ◽  
2021 ◽  
Vol 12 (3) ◽  
pp. 303
Author(s):  
Giovanni Gugliandolo ◽  
Zlatica Marinković ◽  
Giuseppe Campobello ◽  
Giovanni Crupi ◽  
Nicola Donato
Keyword(s):  
Performance Evaluation ◽  
Acoustic Wave ◽  
Equivalent Circuit ◽  
Surface Acoustic Wave ◽  
Equivalent Circuit Model ◽  
Practical Applications ◽  
Saw Devices ◽  
S Parameter ◽  
Commercial Device ◽  
Saw Resonators

Nowadays, surface acoustic wave (SAW) resonators are attracting growing attention, owing to their widespread applications in various engineering fields, such as electronic, telecommunication, automotive, chemical, and biomedical engineering. A thorough assessment of SAW performance is a key task for bridging the gap between commercial SAW devices and practical applications. To contribute to the accomplishment of this crucial task, the present paper reports the findings of a new comparative study that is based on the performance evaluation of different commercial SAW resonators by using scattering (S-) parameter measurements coupled with a Lorentzian fitting and an accurate modelling technique for the straightforward extraction of a lumped-element equivalent-circuit representation. The developed investigation thus provides ease and reliability when choosing the appropriate commercial device, depending on the requirements and constraints of the given sensing application. This paper deals with the performance evaluation of commercial surface acoustic wave (SAW) resonators by means of scattering (S-) parameter measurements and an equivalent-circuit model extracted using a reliable modeling procedure. The studied devices are four TO-39 packaged two-port resonators with different nominal operating frequencies: 418.05, 423.22, 433.92, and 915 MHz. The S-parameter characterization was performed locally around the resonant frequencies of the tested SAW resonators by using an 8753ES Agilent vector network analyzer (VNA) and a home-made calibration kit. The reported measurement-based study has allowed for the development of a comprehensive and detailed comparative analysis of the performance of the investigated SAW devices. The characterization and modelling procedures are fully automated with a user-friendly graphical user interface (GUI) developed in the Python environment, thereby making the experimental analysis faster and more efficient.

Low loss surface acoustic wave SAW devices based on Al1-xMxN (M=Cr, Y, Sc) thin films

2021 ◽  
pp. 412990
Author(s):  
Saad Amara ◽  
Fares Kanouni ◽  
Farouk Laidoudi ◽  
Khaled Bouamama
Keyword(s):  
Thin Films ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Low Loss ◽  
Saw Devices
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