High Harmonic Surface Acoustic Wave Devices for Harsh Environment Sensor Applications

2013 ◽  
Vol 1519 ◽  
Author(s):  
J. Justice ◽  
M. Elbaz ◽  
L. E. Rodak ◽  
D. Korakakis
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Low Cost ◽  
High Harmonic ◽  
High Sensitivity ◽  
Harsh Environments ◽  
Device Performance ◽  
Quality Factors ◽  
Vehicle Exhaust ◽  
Saw Devices

ABSTRACTSurface acoustic wave (SAW) devices are ideal candidates for gas sensors due to their small size, low cost of production and high sensitivity. Increasing restrictions on pollution and emissions create the necessity for sensors that can operate in the harsh environments found in vehicle exhaust systems and industrial production. Gallium nitride (GaN) is a robust, chemically inert, piezoelectric semiconductor, making it an attractive material for SAW devices designed to detect and monitor gases in harsh environments. In this work, SAW devices designed to operate at the 5th and 7th harmonics are fabricated on GaN thin films and their performance is measured through insertion loss, signal to noise ratio, operating frequency and quality factor. Devices are directly exposed to the exhaust gas of a common diesel engine. Device performance is then re-measured and compared. SAW devices fabricated in this work have measured operating frequencies above 1 GHz, and quality factors up to and higher than 2000, depending on the harmonic mode. SAW devices on GaN showed good chemical stability and measured changes in device performance after exhaust exposure was negligible.

scholarly journals Miniaturized Hybrid Frequency Reader for Contactless Measurement Scenarios Using Resonant Surface Acoustic Wave Sensors

Sensors ◽  
2021 ◽  
Vol 21 (7) ◽  
pp. 2367
Author(s):  
Benedict Scheiner ◽  
Florian Probst ◽  
Fabian Michler ◽  
Robert Weigel ◽  
Alexander Koelpin ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Phase Measurement ◽  
Low Cost ◽  
Harsh Environments ◽  
Contactless Measurement ◽  
Torque Measurements ◽  
Acoustic Wave Sensors ◽  
Wear And Tear ◽  
Wave Sensors

Due to higher automation and predictive maintenance, it becomes more and more important to acquire as many data as possible during industrial processes. However, many scenarios require remote sensing since either moving parts would result in wear and tear of cables or harsh environments prevent a wired connection. In the last few years, resonant surface acoustic wave (SAW) sensors have promised the possibility to be interrogable wirelessly which showed very good results in first studies. Therefore, the sensor’s resonance frequency shifts due to a changed measurand and thus has to be determined. However, up to now frequency reader systems showed several drawbacks like high costs or insufficient accuracy that blocked the way for a widespread usage of this approach in the mass market. Hence, this article presents a miniaturized and low cost six-port based frequency reader for SAW resonators in the 2.45 GHz ISM band that does not require an external calculation unit. It is shown that it can be either used to evaluate the scenario or measure the frequency directly with an amplitude or phase measurement, respectively. The performance of the system, including the hardware and embedded software, is finally shown by wired and contactless torque measurements.

scholarly journals Stability studies of ZnO and AlN thin film acoustic wave devices in acid and alkali harsh environments

RSC Advances ◽  
2020 ◽  
Vol 10 (33) ◽  
pp. 19178-19184
Author(s):  
Shuo Xiong ◽  
Xudong Liu ◽  
Jian Zhou ◽  
Yi Liu ◽  
Yiping Shen ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Lab On A Chip ◽  
Harsh Environments ◽  
Stability Studies ◽  
Piezoelectric Thin Films ◽  
Saw Devices ◽  
Acoustic Wave Devices

Surface acoustic wave (SAW) devices based on piezoelectric thin-films such as ZnO and AlN are widely used in sensing, microfluidics and lab-on-a-chip applications.

Surface Acoustic Wave Devices: Materials Stability in Harsh Environments

2012 ◽  
Vol 1519 ◽  
Author(s):  
Denny Richter ◽  
Michal Schulz ◽  
Sergey Sakharov ◽  
Zachary J. Davis ◽  
Holger Fritze
Keyword(s):  
High Temperature ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Harsh Environments ◽  
Platinum Electrodes ◽  
Saw Devices ◽  
Passivation Layers ◽  
Acoustic Wave Devices ◽  
Gallium Content ◽  
The Stability

ABSTRACTThe availability of high-temperature stable surface acoustic wave (SAW) devices would enable realization of wireless sensors for monitoring high-temperature processes. One of the most promising substrate materials for SAW based high-temperature sensors is langasite (LGS, La3Ga5SiO14). It can be excited piezoelectrically up to its melting point at 1470 °C. However, gallium evaporation and degradation of the electrodes limit the application of LGS in SAW sensors for harsh environments to some extent.The objectives of this work include the investigation of the gallium loss in the vicinity of the langasite surface in oxidizing, reducing and vacuum conditions at temperatures up to 900 °C. The gallium content in the vicinity of the LGS surface is not decreased after annealing the samples in air, while a significant gallium loss occurs in vacuum and reducing atmospheres (0.5 % H2/Ar). The latter results in a gallium oxide deficient region of 1.5 μm below the surface after annealing for 12 hours at 900 °C. The gallium loss is virtually completely suppressed after protecting the surface with a thin alumina film.Further, thin-film electrodes based on platinum and platinum/rhodium are tested. While conventional platinum based electrodes are completely destroyed at 900 °C within hours due to agglomeration, alumina protected electrodes can be operated at least for several days at this temperature. After 400 hours at 700 °C, the alumina protected platinum electrodes show insignificant degradation. The influence of alumina passivation layers on the stability of the SAW devices is examined. Different electrode configurations are tested with respect to their long-term frequency stability at 650 °C.

Integrated ZnO Film Based Acoustic Wave Microfluidics and Biosensors

2010 ◽  
Vol 67 ◽  
pp. 49-58 ◽  
Author(s):  
Jack K. Luo ◽  
Y.Q. Fu ◽  
Greg Ashley ◽  
Williams I. Milne
Keyword(s):  
Acoustic Wave ◽  
Acoustic Waves ◽  
Low Cost ◽  
Surface Acoustic Waves ◽  
Acoustic Streaming ◽  
Film Surface ◽  
High Sensitivity ◽  
Zno Film ◽  
Actuation Mechanism ◽  
Saw Devices

Lab-on-a-chip (LOC) is one of the most important microsystems with promising applications in microanalysis, drug development and diagnosis, etc. We have been developing a LOC biodetection system using acoustic wave as a single actuation mechanism for both microfluidics and biosensing using low cost piezoelectric ZnO film. Surface acoustic waves (SAW) coupled into the liquid will induce acoustic streaming, or move the droplet on the surface. These have been utilized to make SAW-based micropumps and micromixers which are simple in structure, easy to fabricate, low cost, reliable and efficient. SAW devices and thin film bulk acoustic resonators (FBAR) have been fabricated on nanocrystalline ZnO thin films deposited using sputtering on Si substrates. A streaming velocity up to ~5cm/s within a microdroplet and a droplet moving speed of ~1cm/s have been achieved. SAW based droplet ejection and vaporization have also been realized. SAW devices and FBARs have been used to detect antibody/antigen and rabbit/goat immunoglobulin type G molecules, showing their high sensitivity. The results have demonstrated the feasibility of using a single actuation mechanism for the LOC.

Flexible Surface Acoustic Wave Based Temperature and Humidity Sensors

2014 ◽  
Vol 1659 ◽  
pp. 75-80 ◽  
Author(s):  
X.L. He ◽  
J. Zhou ◽  
W.B. Wang ◽  
W.P. Xuan ◽  
D.J. Li ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Lamb Waves ◽  
High Sensitivity ◽  
Zno Films ◽  
Humidity Sensors ◽  
Saw Devices ◽  
Flexible Surface ◽  
Temperature And Humidity ◽  
Temperature Coefficient Of Frequency

ABSTRACTFlexible surface acoustic wave (SAW) based temperature and humidity sensors were fabricated and characterized. ZnO piezoelectric films were deposited on polyimide substrates by DC magnetron sputtering. ZnO films possess (0002) crystal orientation with large grain sizes of 50∼70 nm. SAW devices showed two wave modes, namely the Rayleigh and Lamb modes, with the frequencies at fR ∼132MHz and fL∼427MHz respectively for a wavelength of 12 μm device. The two resonant frequencies have a temperature coefficient of frequency (TCF) of −423ppm/K and −258ppm/K for the Rayleigh and Lamb waves, respectively. The SAW sensors exhibited a good repeatability in responding to cyclic change of humidity. The responses of the sensors increase with the increase in humidity, and the sensitivity increases with the decrease in wavelength. A high sensitivity of 34.7 kHz/10%RH has been obtained from a SAW device without any surface treatment, demonstrated that the flexible SAW humidity sensors are very promising for application in flexible sensors and microsystems.

scholarly journals Surface Acoustic Wave Resonators for Wireless Sensor Network Applications in the 433.92 MHz ISM Band

Sensors ◽  
2020 ◽  
Vol 20 (15) ◽  
pp. 4294
Author(s):  
Evangelos Moutoulas ◽  
Muhammad Hamidullah ◽  
Themis Prodromakis
Keyword(s):  
Wireless Sensor Network ◽  
Acoustic Wave ◽  
Sensor Network ◽  
Surface Acoustic Wave ◽  
Low Cost ◽  
Wireless Sensor ◽  
Quality Factors ◽  
Ism Band ◽  
The Impact ◽  
Saw Resonators

Surface acoustic wave (SAW) resonators are low cost devices that can operate wirelessly on a received radio frequency (RF) signal with no requirement for an additional power source. Multiple SAW resonators operating as transponders that form a wireless sensor network (WSN), often need to operate at tightly spaced, different frequencies inside the industrial, scientific and medical (ISM) bands. This requires nanometer precision in the design and fabrication processes. Here, we present results demonstrating a reliable and repeatable fabrication process that yields at least four arrays on a single 4-inch wafer. Each array consists of four single-port resonators with center frequencies allocated inside four different sub-bands that have less than 50 kHz bandwidth and quality factors exceeding 8000. We see promise of standard, low-cost photolithography techniques being used to fabricate multiple SAW resonators with different center resonances all inside the 433.05 MHz–434.79 MHz ISM band and a mere 100 kHz spacing. We achieved that by leveraging the intrinsic process variation of photolithography and the impact of the metallization ratio and metal thickness in rendering distinct resonant frequencies.

scholarly journals On the Performance Evaluation of Commercial SAW Resonators by Means of a Direct and Reliable Equivalent-Circuit Extraction

Micromachines ◽  
2021 ◽  
Vol 12 (3) ◽  
pp. 303
Author(s):  
Giovanni Gugliandolo ◽  
Zlatica Marinković ◽  
Giuseppe Campobello ◽  
Giovanni Crupi ◽  
Nicola Donato
Keyword(s):  
Performance Evaluation ◽  
Acoustic Wave ◽  
Equivalent Circuit ◽  
Surface Acoustic Wave ◽  
Equivalent Circuit Model ◽  
Practical Applications ◽  
Saw Devices ◽  
S Parameter ◽  
Commercial Device ◽  
Saw Resonators

Nowadays, surface acoustic wave (SAW) resonators are attracting growing attention, owing to their widespread applications in various engineering fields, such as electronic, telecommunication, automotive, chemical, and biomedical engineering. A thorough assessment of SAW performance is a key task for bridging the gap between commercial SAW devices and practical applications. To contribute to the accomplishment of this crucial task, the present paper reports the findings of a new comparative study that is based on the performance evaluation of different commercial SAW resonators by using scattering (S-) parameter measurements coupled with a Lorentzian fitting and an accurate modelling technique for the straightforward extraction of a lumped-element equivalent-circuit representation. The developed investigation thus provides ease and reliability when choosing the appropriate commercial device, depending on the requirements and constraints of the given sensing application. This paper deals with the performance evaluation of commercial surface acoustic wave (SAW) resonators by means of scattering (S-) parameter measurements and an equivalent-circuit model extracted using a reliable modeling procedure. The studied devices are four TO-39 packaged two-port resonators with different nominal operating frequencies: 418.05, 423.22, 433.92, and 915 MHz. The S-parameter characterization was performed locally around the resonant frequencies of the tested SAW resonators by using an 8753ES Agilent vector network analyzer (VNA) and a home-made calibration kit. The reported measurement-based study has allowed for the development of a comprehensive and detailed comparative analysis of the performance of the investigated SAW devices. The characterization and modelling procedures are fully automated with a user-friendly graphical user interface (GUI) developed in the Python environment, thereby making the experimental analysis faster and more efficient.

Low loss surface acoustic wave SAW devices based on Al1-xMxN (M=Cr, Y, Sc) thin films

2021 ◽  
pp. 412990
Author(s):  
Saad Amara ◽  
Fares Kanouni ◽  
Farouk Laidoudi ◽  
Khaled Bouamama
Keyword(s):  
Thin Films ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Low Loss ◽  
Saw Devices

A high sensitivity wireless mass-loading surface acoustic wave DNA biosensor

2014 ◽  
Vol 28 (07) ◽  
pp. 1450056 ◽  
Author(s):  
Hua-Lin Cai ◽  
Yi Yang ◽  
Yi-Han Zhang ◽  
Chang-Jian Zhou ◽  
Cang-Ran Guo ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Dna Sequences ◽  
Biological Treatment ◽  
High Performance ◽  
Processing System ◽  
High Sensitivity ◽  
Treatment Method ◽  
Saw Sensor ◽  
Target Dna

In this paper, a surface acoustic wave (SAW) biosensor with gold delay area on LiNbO 3 substrate detecting DNA sequences is proposed. By well-designed device parameters of the SAW sensor, it achieves a high performance for highly sensitive detection of target DNA. In addition, an effective biological treatment method for DNA immobilization and abundant experimental verification of the sensing effect have made it a reliable device in DNA detection. The loading mass of the probe and target DNA sequences is obtained from the frequency shifts, which are big enough in this work due to an effective biological treatment. The experimental results show that the biosensor has a high sensitivity of 1.2 pg/ml/Hz and high selectivity characteristic is also verified by the few responses of other substances. In combination with wireless transceiver, we develop a wireless receiving and processing system that can directly display the detection results.

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