Ti–Si–C–N thin films grown by reactive arc evaporation from Ti3SiC2 cathodes
2011 ◽
Vol 26
(7)
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pp. 874-881
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Abstract
1999 ◽
Vol 308-311
◽
pp. 283-289
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Keyword(s):
1997 ◽
Vol 90
(1-2)
◽
pp. 178-183
◽
2018 ◽
Vol 33
(24)
◽
pp. 4165-4172
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2016 ◽
Vol 31
(8)
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pp. 1018-1026
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Keyword(s):
2016 ◽
Vol 32
(1)
◽
pp. 37-44
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Keyword(s):
2019 ◽
Vol 35
(7)
◽
pp. 720-731
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Keyword(s):
2019 ◽
Vol 34
(16)
◽
pp. 2765-2774
◽
2013 ◽
Vol 28
(13)
◽
pp. 1699-1706
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Keyword(s):