scholarly journals Micro-fabricated vapor cells sealed Rb atoms by distillation at wafer level and two-step bonding for miniature atomic clocks

2021 ◽  
Author(s):  
Hitoshi Nishino ◽  
Yasubumi Furuya ◽  
Takahito Ono
Keyword(s):  
Atomic Clocks ◽  
Wafer Level ◽  
Vapor Cells

scholarly journals Micro Vapor Cells Sealed by Two-step Bonding for Miniature Atomic Clocks

2021 ◽  
Author(s):  
Hitoshi Nishino ◽  
Yasubumi Furuya ◽  
Takahito Ono
Keyword(s):  
Production Efficiency ◽  
Atomic Clocks ◽  
Fabrication Method ◽  
Light Path ◽  
Wafer Level ◽  
Vapor Cell ◽  
Rb Vapor ◽  
Alkali Atoms ◽  
Vapor Cells ◽  
Level Process

Abstract This paper reports the proposal, fabrication, and evaluation of Rb vapor cells sealed by two-step bonding for miniature atomic clocks. The proposed fabrication method is separating the light path filled with Alkali atoms and Alkali dispenser’s room at wafer level process. The first fabricated sample is unexpectedly sealed with some air, and the vapor cell is measured the absorption spectra and CPT resonance. The flow solving the problems is indicated, and the vapor cells are fabricated again with the improved process. The FWHM of CPT resonance fits almost the theoretical value in vacuum-sealed samples, which are filled with Rb atoms carried from one dispenser. These results show that fabricated vapor cells are filled with Rb without degassing or leaks, and the reliability of the fabrication process and the production efficiency can be expected. Rb vapor cell sealed in the controlled pressure with buffer gases N2/Ar is also fabricated and evaluated. The spectrum line is broadened, and CPT resonance peak is narrowed 4.0 kHz at 90 °C. These results show the proposal fabrication method of the alkali vapor cells is useful for miniature atomic clocks.

Advanced microfabrication technologies for miniature caesium vapor cells for atomic clocks

2019 ◽  
Author(s):  
Christophe Gorecki ◽  
Nicolas Passilly ◽  
Vincent Maurice ◽  
Sylwester Bargiel ◽  
Ravinder Chutani ◽  
...  
Keyword(s):  
Atomic Clocks ◽  
Vapor Cells

Wafer-Level Hermetic All-Glass Packaging for Microalkali Vapor Cells of Chip-Scale Atomic Devices

2015 ◽  
Vol 5 (11) ◽  
pp. 1551-1558 ◽  
Author(s):  
Yu Ji ◽  
Qi Gan ◽  
Lei Wu ◽  
Jintang Shang ◽  
Ching-Ping Wong
Keyword(s):  
Wafer Level ◽  
Vapor Cells ◽  
Glass Packaging

Microfabrication of cesium vapor cells with buffer gas for MEMS atomic clocks

2011 ◽  
Vol 167 (2) ◽  
pp. 594-601 ◽  
Author(s):  
M. Hasegawa ◽  
R.K. Chutani ◽  
C. Gorecki ◽  
R. Boudot ◽  
P. Dziuban ◽  
...  
Keyword(s):  
Atomic Clocks ◽  
Buffer Gas ◽  
Cesium Vapor ◽  
Vapor Cells

scholarly journals Double-resonance in alkali vapor cells for high performance and miniature atomic clocks

2012 ◽  
Author(s):  
Thejesh Bandi ◽  
Matthieu Pellaton ◽  
Danijela Miletic ◽  
Christoph Affolderbach ◽  
Florian Gruet ◽  
...  
Keyword(s):  
High Performance ◽  
Double Resonance ◽  
Atomic Clocks ◽  
Vapor Cells
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