Measurement of optical thickness variation of BK7 plate by wavelength tuning interferometry

Yangjin Kim; Kenichi Hibino; Naohiko Sugita; Mamoru Mitsuishi

doi:10.1364/oe.23.022928

Measurement of optical thickness variation of BK7 plate by wavelength tuning interferometry

Optics Express ◽

10.1364/oe.23.022928 ◽

2015 ◽

Vol 23 (17) ◽

pp. 22928 ◽

Cited By ~ 9

Author(s):

Yangjin Kim ◽

Kenichi Hibino ◽

Naohiko Sugita ◽

Mamoru Mitsuishi

Keyword(s):

Optical Thickness ◽

Wavelength Tuning ◽

Thickness Variation

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Measurement of the surface shape and optical thickness variation of a polishing crystal wafer by wavelength tuning interferometer

10.1117/12.2051193 ◽

2014 ◽

Cited By ~ 1

Author(s):

Yangjin Kim ◽

Kenichi Hibino ◽

Ryohei Hanayama ◽

Naohiko Sugita ◽

Mamoru Mitsuishi

Keyword(s):

Optical Thickness ◽

Wavelength Tuning ◽

Surface Shape ◽

Thickness Variation ◽

Crystal Wafer

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Measurement of optical thickness variation of a multiple-surface object by a wavelength tuning interferometer

10.1117/12.666830 ◽

2006 ◽

Author(s):

Jan Burke ◽

Kenichi Hibino ◽

Ryohei Hanayama ◽

Bonzenko F. Oreb

Keyword(s):

Optical Thickness ◽

Wavelength Tuning ◽

Thickness Variation ◽

Surface Object

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Interferometric profile measurement of optical-thickness by wavelength tuning with suppression of spatially uniform error

Optics Express ◽

10.1364/oe.26.010870 ◽

2018 ◽

Vol 26 (8) ◽

pp. 10870 ◽

Cited By ~ 6

Author(s):

Yangjin Kim ◽

Kenichi Hibino ◽

Mamoru Mitsuishi

Keyword(s):

Optical Thickness ◽

Wavelength Tuning ◽

Profile Measurement ◽

Uniform Error

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Optical thickness measurement of mask blank glass plate by the excess fraction method using a wavelength-tuning interferometer

Optics and Lasers in Engineering ◽

10.1016/j.optlaseng.2013.04.003 ◽

2013 ◽

Vol 51 (10) ◽

pp. 1173-1178 ◽

Cited By ~ 9

Author(s):

Yangjin Kim ◽

Kenichi Hibino ◽

Naohiko Sugita ◽

Mamoru Mitsuishi

Keyword(s):

Optical Thickness ◽

Glass Plate ◽

Thickness Measurement ◽

Wavelength Tuning ◽

Fraction Method

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Design of a phase-shifting algorithm for interferometric measurement of optical thickness variation

Photonic Instrumentation Engineering VII ◽

10.1117/12.2554163 ◽

2020 ◽

Author(s):

Wonjun Bae ◽

Yangjin Kim

Keyword(s):

Optical Thickness ◽

Phase Shifting ◽

Thickness Variation ◽

Interferometric Measurement

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1512 Precision Measurement of Surface Shape and Thickness Variation of Semi-Conductor Mask Glass with Wavelength Tuning Interferometry

The proceedings of the JSME annual meeting ◽

10.1299/jsmemecjo.2006.4.0_77 ◽

2006 ◽

Vol 2006.4 (0) ◽

pp. 77-78

Author(s):

Sangkyu LEE ◽

Mamoru MITSUISHI ◽

Kenichi HIBINO

Keyword(s):

Precision Measurement ◽

Wavelength Tuning ◽

Surface Shape ◽

Thickness Variation

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Absolute optical thickness measurement of transparent plate using excess fraction method and wavelength-tuning Fizeau interferometer

Optics Express ◽

10.1364/oe.23.004065 ◽

2015 ◽

Vol 23 (4) ◽

pp. 4065 ◽

Cited By ~ 12

Author(s):

Yangjin Kim ◽

Kenichi Hibino ◽

Naohiko Sugita ◽

Mamoru Mitsuishi

Keyword(s):

Optical Thickness ◽

Thickness Measurement ◽

Wavelength Tuning ◽

Fizeau Interferometer ◽

Transparent Plate ◽

Fraction Method

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Simultaneous measurement of surface shape and absolute optical thickness of a glass plate by wavelength tuning phase-shifting interferometry

Optical Review ◽

10.1007/s10043-012-0038-2 ◽

2012 ◽

Vol 19 (4) ◽

pp. 247-253 ◽

Cited By ~ 18

Author(s):

Kenichi Hibino ◽

Yangjin Kim ◽

Sangyu Lee ◽

Yohan Kondo ◽

Naohiko Sugita ◽

...

Keyword(s):

Optical Thickness ◽

Simultaneous Measurement ◽

Glass Plate ◽

Phase Shifting ◽

Wavelength Tuning ◽

Surface Shape ◽

Phase Shifting Interferometry

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Measurement of absolute optical thickness by wavelength tuning interferometer

10.1117/12.901637 ◽

2011 ◽

Cited By ~ 1

Author(s):

Kenichi Hibino ◽

Yangjin Kim ◽

Youichi Bitou ◽

Mamoru Mitsuishi

Keyword(s):

Optical Thickness ◽

Wavelength Tuning

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Improved algorithms for wavelength scanning interferometry: application to the simultaneous measurement of surface topography and optical thickness variation in a transparent parallel plate

10.1117/12.472221 ◽

2002 ◽

Cited By ~ 2

Author(s):

Kenichi Hibino ◽

Bozenko F. Oreb ◽

Philip S. Fairman

Keyword(s):

Surface Topography ◽

Optical Thickness ◽

Simultaneous Measurement ◽

Parallel Plate ◽

Thickness Variation ◽

Wavelength Scanning

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