Improved algorithms for wavelength scanning interferometry: application to the simultaneous measurement of surface topography and optical thickness variation in a transparent parallel plate

2002 ◽  
Author(s):  
Kenichi Hibino ◽  
Bozenko F. Oreb ◽  
Philip S. Fairman
Keyword(s):  
Surface Topography ◽  
Optical Thickness ◽  
Simultaneous Measurement ◽  
Parallel Plate ◽  
Thickness Variation ◽  
Wavelength Scanning

Surface topography by wavelength scanning interferometry

1998 ◽  
Author(s):  
Ichirou Yamaguchi ◽  
Akihiro Yamamoto ◽  
Masaru Yano
Keyword(s):  
Surface Topography ◽  
Wavelength Scanning

Wavelength-scanning interferometry of a transparent parallel plate with refractive-index dispersion

2003 ◽  
Vol 42 (19) ◽  
pp. 3888 ◽  
Author(s):  
Kenichi Hibino ◽  
Bozenko F. Oreb ◽  
Philip S. Fairman
Keyword(s):  
Refractive Index ◽  
Parallel Plate ◽  
Refractive Index Dispersion ◽  
Wavelength Scanning
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