Measurement of absolute optical thickness by wavelength tuning interferometer

2011 ◽  
Author(s):  
Kenichi Hibino ◽  
Yangjin Kim ◽  
Youichi Bitou ◽  
Mamoru Mitsuishi
Keyword(s):  
Optical Thickness ◽  
Wavelength Tuning

scholarly journals Simultaneous measurement of surface shape and optical thickness using wavelength tuning and a polynomial window function

2015 ◽  
Vol 23 (25) ◽  
pp. 32869 ◽  
Author(s):  
Yangjin Kim ◽  
Kenichi Hibino ◽  
Naohiko Sugita ◽  
Mamoru Mitsuishi
Keyword(s):  
Optical Thickness ◽  
Simultaneous Measurement ◽  
Wavelength Tuning ◽  
Surface Shape ◽  
Window Function

Measurement of absolute optical thickness distribution of a mask-glass by wavelength tuning interferometry

2008 ◽  
Author(s):  
Kenichi Hibino ◽  
Kim Yangjin ◽  
Youichi Bitou ◽  
Sonko Ohsawa ◽  
Naohiko Sugita ◽  
...  
Keyword(s):  
Optical Thickness ◽  
Thickness Distribution ◽  
Wavelength Tuning

Measurement of absolute optical thickness of mask glass by wavelength-tuning Fourier analysis

2015 ◽  
Vol 40 (13) ◽  
pp. 3169 ◽  
Author(s):  
Yangjin Kim ◽  
Kenichi Hibino ◽  
Naohiko Sugita ◽  
Mamoru Mitsuishi
Keyword(s):  
Fourier Analysis ◽  
Optical Thickness ◽  
Wavelength Tuning
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