Variable angle of incidence spectroscopic autocollimating ellipsometer

2010 ◽  
Vol 49 (16) ◽  
pp. 3231 ◽  
Author(s):  
Lionel R. Watkins ◽  
Sophie S. Shamailov
Keyword(s):  
Angle Of Incidence ◽  
Variable Angle

Variable Angle of Incidence Spectroscopic Ellipsometric Measurement of the Franz-Keloysh Effect in Modfet Structures

1986 ◽  
Vol 77 ◽  
Author(s):  
P. G. Snyder ◽  
J. E. Oh ◽  
J. A. Woollam
Keyword(s):  
Electric Field ◽  
Bandgap Energy ◽  
Model Parameters ◽  
Angle Of Incidence ◽  
Internal Electric Field ◽  
Ellipsometric Measurement ◽  
Band Bending ◽  
Variable Angle ◽  
Two Samples ◽  
Franz Keldysh Effect

ABSTRACTIt has been shown recently that variable angle of incidence spectroscopie ellipsometry (VASE) is a sensitive technique for determining semiconductor multilayer model parameters, e.g. layer thicknesses and ternary compositions. In this paper we show that VASE is, in addition, sensitive to the Franz-Keldysh effect induced by band bending in the barrier layer of a GaAs-AlGaAs-GaAs (MODFET) structure. VASE measurements differ from electro-reflectance and photoreflectance, in that the internal heterojunction region electric field is directly probed, without the application of a modulating field. The Franz-Keldysh effect appears in the VASE spectra near the AlGaAs bandgap energy. Data for two samples, with different doping profiles, are quantitatively modeled to determine the internal electric field amplitudes.

Grazing Incidence Spectrometer with Variable Angle of Incidence

1969 ◽  
Vol 8 (12) ◽  
pp. 2537 ◽  
Author(s):  
P. Bogen ◽  
H. Conrads ◽  
G. Gatti ◽  
W. Kohlhaas
Keyword(s):  
Grazing Incidence ◽  
Angle Of Incidence ◽  
Variable Angle

Determination of specular reflectances in a liquid medium with a variable angle of incidence

1995 ◽  
Vol 34 (4) ◽  
pp. 695 ◽  
Author(s):  
S. Gil ◽  
G. A. Clarke ◽  
L. McGarry ◽  
C. E. Waltham
Keyword(s):  
Liquid Medium ◽  
Angle Of Incidence ◽  
Variable Angle

scholarly journals Variable angle of incidence analysis of magneto‐optic multilayers

1990 ◽  
Vol 67 (9) ◽  
pp. 4801-4802 ◽  
Author(s):  
William A. McGahan ◽  
Liang‐Yao Chen ◽  
John A. Woollam
Keyword(s):  
Angle Of Incidence ◽  
Variable Angle ◽  
Incidence Analysis ◽  
Magneto Optic

Superlattice Optical Properties Measured by Variable Angle Spectroscopic Ellipsometry

1987 ◽  
Vol 102 ◽  
Author(s):  
P. G. Snyder ◽  
K. G. Merkel ◽  
B. N. De ◽  
J. A. Woollam ◽  
D. W. Langer ◽  
...  
Keyword(s):  
Spectroscopic Ellipsometry ◽  
Room Temperature ◽  
Optical Constants ◽  
Nondestructive Method ◽  
Effective Index ◽  
Index Of Refraction ◽  
Angle Of Incidence ◽  
Variable Angle ◽  
Superlattice Layer ◽  
Effective Index Of Refraction

ABSTRACTVariable Angle of incidence Spectroscopic Ellipsometry (VASE) is a sensitive, nondestructive method of determining optical constants, layer thicknesses, alloy compositions and other parameters. We model the VASE data for a sample containing a 20 period Al0 5Ga0 5As-GaAs superlattice, to obtain the effective index of refraction (n) and e tinction coefficient (k) of the superlattice layer. The room temperature VASE spectra contain strong, sharp features at the e-hh(1), e-lh(1) and e-hh(2) excitonic tran-sition energies. In addition, VASE was used to characterize more compli-cated layered structures, which also contained superlattices.

Optical Characterization of 4H-SiC by Variable Angle of Incidence Spectroscopic Ellipsometry

2000 ◽  
Vol 338-342 ◽  
pp. 575-578 ◽  
Author(s):  
O.P. Alexander Lindquist ◽  
H. Arwin ◽  
Urban Forsberg ◽  
Peder Bergman ◽  
K. Järrendahl
Keyword(s):  
Spectroscopic Ellipsometry ◽  
Optical Characterization ◽  
Angle Of Incidence ◽  
Variable Angle
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