Optical‐ and magneto‐optical measurements using a variable angle of incidence spectroscopic ellipsometer: Application to DyCo multilayers

1989 ◽  
Vol 7 (3) ◽  
pp. 1271-1272 ◽  
Author(s):  
William A. McGahan ◽  
Z. S. Shan ◽  
Alan M. Massengale ◽  
Thomas E. Tiwald ◽  
John A. Woollam
Keyword(s):  
Optical Measurements ◽  
Angle Of Incidence ◽  
Spectroscopic Ellipsometer ◽  
Variable Angle

Variable Angle of Incidence Spectroscopic Ellipsometric Measurement of the Franz-Keloysh Effect in Modfet Structures

1986 ◽  
Vol 77 ◽  
Author(s):  
P. G. Snyder ◽  
J. E. Oh ◽  
J. A. Woollam
Keyword(s):  
Electric Field ◽  
Bandgap Energy ◽  
Model Parameters ◽  
Angle Of Incidence ◽  
Internal Electric Field ◽  
Ellipsometric Measurement ◽  
Band Bending ◽  
Variable Angle ◽  
Two Samples ◽  
Franz Keldysh Effect

ABSTRACTIt has been shown recently that variable angle of incidence spectroscopie ellipsometry (VASE) is a sensitive technique for determining semiconductor multilayer model parameters, e.g. layer thicknesses and ternary compositions. In this paper we show that VASE is, in addition, sensitive to the Franz-Keldysh effect induced by band bending in the barrier layer of a GaAs-AlGaAs-GaAs (MODFET) structure. VASE measurements differ from electro-reflectance and photoreflectance, in that the internal heterojunction region electric field is directly probed, without the application of a modulating field. The Franz-Keldysh effect appears in the VASE spectra near the AlGaAs bandgap energy. Data for two samples, with different doping profiles, are quantitatively modeled to determine the internal electric field amplitudes.

Grazing Incidence Spectrometer with Variable Angle of Incidence

1969 ◽  
Vol 8 (12) ◽  
pp. 2537 ◽  
Author(s):  
P. Bogen ◽  
H. Conrads ◽  
G. Gatti ◽  
W. Kohlhaas
Keyword(s):  
Grazing Incidence ◽  
Angle Of Incidence ◽  
Variable Angle

Variable angle of incidence spectroscopic autocollimating ellipsometer

2010 ◽  
Vol 49 (16) ◽  
pp. 3231 ◽  
Author(s):  
Lionel R. Watkins ◽  
Sophie S. Shamailov
Keyword(s):  
Angle Of Incidence ◽  
Variable Angle

Determination of specular reflectances in a liquid medium with a variable angle of incidence

1995 ◽  
Vol 34 (4) ◽  
pp. 695 ◽  
Author(s):  
S. Gil ◽  
G. A. Clarke ◽  
L. McGarry ◽  
C. E. Waltham
Keyword(s):  
Liquid Medium ◽  
Angle Of Incidence ◽  
Variable Angle

Wide-spectral-range, Expanded-beam Spectroscopic Ellipsometer and its Application for Imaging/Mapping of Graded Nanocrystalline Si:H Films

2011 ◽  
Vol 1321 ◽  
Author(s):  
A. Nemeth ◽  
D. Attygalle ◽  
L. R. Dahal ◽  
P. Aryal ◽  
Z. Huang ◽  
...  
Keyword(s):  
Spectral Range ◽  
High Speed ◽  
Detection System ◽  
Two Dimensions ◽  
Angle Of Incidence ◽  
Large Area ◽  
Production Lines ◽  
Hydrogenated Silicon ◽  
Spectroscopic Ellipsometer ◽  
Diffuse Illumination

ABSTRACTA prototype expanded-beam spectroscopic ellipsometer has been developed that uses uncollimated (non-parallel, diffuse) illumination with a detection system consisting of an angle-of-incidence-sensitive pinhole camera for high-speed, large-area imaging/mapping applications. The performance of this novel instrument is being tested for imaging/mapping of mixed-phase hydrogenated silicon films having graded amorphous (a-Si:H) and nanocrystalline (nc-Si:H) components throughout the film depth. The speed of the measurement system makes the instrument suitable for use on production lines. The precision enables detection of subnanometer thicknesses, and refractive index and extinction coefficient changes of 0.01. Angle-of-incidence and mirror calibrations are made via well-known sample structures. Alternative commercial instrumentation for mapping by spectroscopic ellipsometry must translate the sample or ellipsometer in two dimensions. For this instrumentation, even a 15 × 15 cm2 sample with cm2 resolution requires > 200 measurements and at least 15 min. By imaging along one dimension in parallel, the expanded-beam system can measure with similar resolution in < 2 min. The focus of recent instrumentation efforts is on improving the overall system spectral range and its performance.

New design of the variable angle infrared spectroscopic ellipsometer using double Fourier transforms

2000 ◽  
Vol 71 (7) ◽  
pp. 2677-2683 ◽  
Author(s):  
Guo-Qiang Xia ◽  
Rong-Jun Zhang ◽  
Yu-Li Chen ◽  
Hai-Bing Zhao ◽  
Song-You Wang ◽  
...  
Keyword(s):  
Fourier Transforms ◽  
Spectroscopic Ellipsometer ◽  
Variable Angle ◽  
Infrared Spectroscopic

scholarly journals Variable angle of incidence analysis of magneto‐optic multilayers

1990 ◽  
Vol 67 (9) ◽  
pp. 4801-4802 ◽  
Author(s):  
William A. McGahan ◽  
Liang‐Yao Chen ◽  
John A. Woollam
Keyword(s):  
Angle Of Incidence ◽  
Variable Angle ◽  
Incidence Analysis ◽  
Magneto Optic
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