Superlattice Optical Properties Measured by Variable Angle Spectroscopic Ellipsometry
Keyword(s):
ABSTRACTVariable Angle of incidence Spectroscopic Ellipsometry (VASE) is a sensitive, nondestructive method of determining optical constants, layer thicknesses, alloy compositions and other parameters. We model the VASE data for a sample containing a 20 period Al0 5Ga0 5As-GaAs superlattice, to obtain the effective index of refraction (n) and e tinction coefficient (k) of the superlattice layer. The room temperature VASE spectra contain strong, sharp features at the e-hh(1), e-lh(1) and e-hh(2) excitonic tran-sition energies. In addition, VASE was used to characterize more compli-cated layered structures, which also contained superlattices.
2004 ◽
Vol 18
(25)
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pp. 1275-1291
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2014 ◽
Vol 7
(7)
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pp. 7321-7366
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Keyword(s):
1991 ◽
Vol 206
(1-2)
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pp. 248-253
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