Correction of thickness uniformity of multilayerfluoride coatings on steep spherical substrates usingshadowing mask combinations in planetary rotationsystems
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1993 ◽
Vol 61
(1-3)
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pp. 282-286
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1999 ◽
Vol 12
(3)
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pp. 340-344
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2007 ◽
Vol 539-543
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pp. 2872-2877
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2016 ◽
Vol 164
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pp. 139-144
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