Influence of discrete drop locations on film thickness uniformity in UV- nanoimprint lithography

Microelectronic Engineering ◽

10.1016/j.mee.2016.07.014 ◽

2016 ◽

Vol 164 ◽

pp. 139-144 ◽

Cited By ~ 3

Author(s):

Shrawan Singhal ◽

S.V. Sreenivasan

Keyword(s):

Film Thickness ◽

Nanoimprint Lithography ◽

Thickness Uniformity

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The use of mahalanobis distance in solving the sputtering process thin‐film thickness uniformity quality problem

Journal of the Chinese Institute of Engineers ◽

10.1080/02533839.2010.9671691 ◽

2010 ◽

Vol 33 (7) ◽

pp. 1021-1033

Author(s):

Taho Yang ◽

Yuan‐Ting Cheng ◽

Yu‐An Shen

Keyword(s):

Thin Film ◽

Film Thickness ◽

Mahalanobis Distance ◽

Thin Film Thickness ◽

Quality Problem ◽

Thickness Uniformity

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Effect of the Pd–Au thin film thickness uniformity on the performance of an optical fiber hydrogen sensor

Applied Surface Science ◽

10.1016/j.apsusc.2007.04.059 ◽

2007 ◽

Vol 253 (21) ◽

pp. 8615-8619 ◽

Cited By ~ 25

Author(s):

Donato Luna-Moreno ◽

David Monzón-Hernández

Keyword(s):

Thin Film ◽

Optical Fiber ◽

Film Thickness ◽

Hydrogen Sensor ◽

Thin Film Thickness ◽

Thickness Uniformity ◽

Au Thin Film

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Effect of high-frequency switching electrolysis on film thickness uniformity of anodic oxide film formed on AC8A Aluminum alloy

Journal of Japan Institute of Light Metals ◽

10.2464/jilm.60.602 ◽

2010 ◽

Vol 60 (11) ◽

pp. 602-607 ◽

Cited By ~ 7

Author(s):

Tomoharu Yamamoto ◽

Hiroomi Tanaka ◽

Masahiro Fujita ◽

Hidetaka Asoh ◽

Sachiko Ono

Keyword(s):

Aluminum Alloy ◽

Oxide Film ◽

Film Thickness ◽

High Frequency ◽

Anodic Oxide ◽

Anodic Oxide Film ◽

Thickness Uniformity

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Quantitative evaluation of film thickness uniformity: Application to off-axis magnetron source onto a rotating substrate

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.2429677 ◽

2007 ◽

Vol 25 (2) ◽

pp. 215-220 ◽

Cited By ~ 5

Author(s):

X. S. Du ◽

Y. D. Jiang ◽

J. S. Yu ◽

J. Li ◽

G. Z. Xie

Keyword(s):

Film Thickness ◽

Quantitative Evaluation ◽

Thickness Uniformity

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Modeling and simulation of stamp deflections in nanoimprint lithography: Exploiting backside grooves to enhance residual layer thickness uniformity

Microelectronic Engineering ◽

10.1016/j.mee.2010.12.090 ◽

2011 ◽

Vol 88 (8) ◽

pp. 2154-2157 ◽

Cited By ~ 8

Author(s):

Hayden Taylor ◽

Kristian Smistrup ◽

Duane Boning

Keyword(s):

Modeling And Simulation ◽

Layer Thickness ◽

Nanoimprint Lithography ◽

Residual Layer ◽

Thickness Uniformity

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MINIMIZATION AND CONTROL OF RANDOM EFFECTS ON FILM THICKNESS UNIFORMITY BY OPTIMIZED DESIGN OF COATING DIE INTERNALS

The Mechanics of Thin Film Coatings ◽

10.1142/9789814503914_0008 ◽

1996 ◽

Cited By ~ 2

Author(s):

F. Durst ◽

U. Lange ◽

H. Raszillier

Keyword(s):

Film Thickness ◽

Random Effects ◽

Optimized Design ◽

Thickness Uniformity ◽

And Control

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Deposition probe technique for the determination of film thickness uniformity

Review of Scientific Instruments ◽

10.1063/1.1149100 ◽

1998 ◽

Vol 69 (9) ◽

pp. 3353-3356 ◽

Cited By ~ 16

Author(s):

M. M. M. Bilek ◽

I. G. Brown

Keyword(s):

Film Thickness ◽

Probe Technique ◽

Thickness Uniformity

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Investigation of Film Thickness Uniformity on Substrates Located Close to the Source Axis

Applied Optics ◽

10.1364/ao.12.000758 ◽

1973 ◽

Vol 12 (4) ◽

pp. 758 ◽

Cited By ~ 3

Author(s):

Jean M. Bennett ◽

E. J. Ashley

Keyword(s):

Film Thickness ◽

Thickness Uniformity

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Drift in film thickness uniformity arising from sputtering target recrystallization

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.575942 ◽

1989 ◽

Vol 7 (3) ◽

pp. 2355-2358 ◽

Cited By ~ 3

Author(s):

G. R. Haupt ◽

C. E. Wickersham

Keyword(s):

Film Thickness ◽

Thickness Uniformity

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Study on Film Thickness Uniformity of Magnetron Sputtering System Based on Twin Target

Acta Optica Sinica ◽

10.3788/aos202141.0731001 ◽

2021 ◽

Vol 41 (7) ◽

pp. 0731001

Author(s):

魏博洋 Wei Boyang ◽

刘冬梅 Liu Dongmei ◽

付秀华 Fu Xiuhua ◽

张静 Zhang Jing ◽

汪洋 Wang Yang ◽

...

Keyword(s):

Magnetron Sputtering ◽

Film Thickness ◽

Thickness Uniformity ◽

Sputtering System

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