scholarly journals In situ chemical sensing by using scanning probe microscope

2019 ◽  
Vol 153 (6) ◽  
pp. 267-272
Author(s):  
Yasufumi Takahashi ◽  
Yuanshu Zhou ◽  
Takeshi Fukuma
Keyword(s):  
Chemical Sensing ◽  
Scanning Probe Microscope ◽  
Scanning Probe ◽  
Probe Microscope

AFM-Based Testing and Measurements of Contact and Stiction in a Micromechanical Switch

2004 ◽  
Author(s):  
Lei Chen ◽  
Nicol E. McGruer ◽  
George G. Adams
Keyword(s):  
Contact Resistance ◽  
Scanning Probe Microscope ◽  
The Other ◽  
Scanning Probe ◽  
Repeated Loading ◽  
Experimental Setup ◽  
Fundamental Physics ◽  
High Stiffness ◽  
Probe Microscope

Cycling of a micromechanical switch with gold-on-gold contacts demonstrates that the contact resistance decreases and the adherence force increases. An experimental setup using a Scanning Probe Microscope (SPM) is allowing the fundamental physics of this behavior to be better understood. The setup includes two side-by-side cantilevers — one of high stiffness which applies the repeated loading and the other a standard profiling cantilever allowing in-situ measurements of topographical changes.

Scanning-probe microscope analysis of optical thin films: A new analytical tool in a manufacturing environment

1994 ◽  
Vol 52 ◽  
pp. 1068-1069
Author(s):  
S. P. Sapers ◽  
R. Clark ◽  
P. Somerville
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Thermal Control ◽  
Scanning Probe Microscope ◽  
Scanning Probe ◽  
List Type ◽  
Manufacturing Environment ◽  
Physical Measurements ◽  
Probe Microscope

OCLI is a leading manufacturer of thin films for optical and thermal control applications. The determination of thin film and substrate topography can be a powerful way to obtain information for deposition process design and control, and about the final thin film device properties. At OCLI we use a scanning probe microscope (SPM) in the analytical lab to obtain qualitative and quantitative data about thin film and substrate surfaces for applications in production and research and development. This manufacturing environment requires a rapid response, and a large degree of flexibility, which poses special challenges for this emerging technology. The types of information the SPM provides can be broken into three categories:(1)Imaging of surface topography for visualization purposes, especially for samples that are not SEM compatible due to size or material constraints;(2)Examination of sample surface features to make physical measurements such as surface roughness, lateral feature spacing, grain size, and surface area;(3)Determination of physical properties such as surface compliance, i.e. “hardness”, surface frictional forces, surface electrical properties.

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