AFM-Based Testing and Measurements of Contact and Stiction in a Micromechanical Switch

2004 ◽  
Author(s):  
Lei Chen ◽  
Nicol E. McGruer ◽  
George G. Adams
Keyword(s):  
Contact Resistance ◽  
Scanning Probe Microscope ◽  
The Other ◽  
Scanning Probe ◽  
Repeated Loading ◽  
Experimental Setup ◽  
Fundamental Physics ◽  
High Stiffness ◽  
Probe Microscope

Cycling of a micromechanical switch with gold-on-gold contacts demonstrates that the contact resistance decreases and the adherence force increases. An experimental setup using a Scanning Probe Microscope (SPM) is allowing the fundamental physics of this behavior to be better understood. The setup includes two side-by-side cantilevers — one of high stiffness which applies the repeated loading and the other a standard profiling cantilever allowing in-situ measurements of topographical changes.

scholarly journals A Scanning Probe Microscope in My Scanning Electron Microscope?

1995 ◽  
Vol 3 (2) ◽  
pp. 22-23
Author(s):  
George J. Collins
Keyword(s):  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Scientific Literature ◽  
Scanning Probe Microscope ◽  
The Other ◽  
Scanning Probe ◽  
Primary Reason ◽  
Probe Microscope ◽  
Scanning Electron

Scanning probe microscopes (SPMs) designed to fit into scanning elec- tron microscopes (SEMs) are now becoming commercially available and you might ask, "Why would I want to put an SPM in my SEM"? The primary reason is that the too forms of microscope are very complimentary. Each microscope extends the power of the other. The SEM can do things that are hard to do with an SPM, and vice versa.Not long after the introduction of the STM and the AFM, a few re- searchers built custom SPMs and installed them in their SEMs. The reports of these projects to build hybrid microscopes and examples of the data they produced can be found in the scientific literature.

Appling Micro Devices to Scanning Probe Microscopes for Micro/Nano Tribology Study (Keynote)

2005 ◽  
Author(s):  
Yasuhisa Ando ◽  
Shiraishi Naoki
Keyword(s):  
Three Dimensional ◽  
Force Sensor ◽  
Lateral Force ◽  
Scanning Probe Microscope ◽  
Silicon On Insulator ◽  
Experimental Results ◽  
The Other ◽  
Scanning Probe ◽  
Electromechanical Systems ◽  
Probe Microscope

We have designed and fabricated two kinds of micro devices. The mechanisms of the micro devices and some experimental results using the micro devices are described in this paper. The first device is a three-dimensional (3D) microstage and the other is a lateral force sensor. Each device was fabricated on an SOI (silicon on insulator) wafer using MEMS (micro electromechanical systems) technology. We applied these devices to an SPM (scanning probe microscope) and conducted tribology tests.

Contact resistance study of noble metals and alloy films using a scanning probe microscope test station

2007 ◽  
Vol 102 (7) ◽  
pp. 074910 ◽  
Author(s):  
L. Chen ◽  
H. Lee ◽  
Z. J. Guo ◽  
N. E. McGruer ◽  
K. W. Gilbert ◽  
...  
Keyword(s):  
Contact Resistance ◽  
Noble Metals ◽  
Scanning Probe Microscope ◽  
Scanning Probe ◽  
Alloy Films ◽  
Probe Microscope

scholarly journals In situ chemical sensing by using scanning probe microscope

2019 ◽  
Vol 153 (6) ◽  
pp. 267-272
Author(s):  
Yasufumi Takahashi ◽  
Yuanshu Zhou ◽  
Takeshi Fukuma
Keyword(s):  
Chemical Sensing ◽  
Scanning Probe Microscope ◽  
Scanning Probe ◽  
Probe Microscope
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