scholarly journals Preparation of a Precursor Solution for SiO2 Film Formation and Its Application to the Formation of Au Cluster-dispersed SiO2 Films.

2002 ◽  
pp. 135-140
Author(s):  
Chihiro MOCHIZUKI ◽  
Mitsunobu SATO ◽  
Isao NAKAMURA ◽  
Tomohiro MATSUBARA ◽  
Takeshi YOSHIDA ◽  
...  
Keyword(s):  
Film Formation ◽  
Precursor Solution ◽  
Sio2 Film ◽  
Sio2 Films ◽  
Au Cluster

High-quality SiO2 film formation by highly concentrated ozone gas at below 600 °C

2002 ◽  
Vol 81 (12) ◽  
pp. 2190-2192 ◽  
Author(s):  
Tetsuya Nishiguchi ◽  
Hidehiko Nonaka ◽  
Shingo Ichimura ◽  
Yoshiki Morikawa ◽  
Mitsuru Kekura ◽  
...  
Keyword(s):  
Film Formation ◽  
Sio2 Film ◽  
High Quality

scholarly journals Impact of Perovskite Composition on Film Formation Quality and Photophysical Properties for Flexible Perovskite Solar Cells

Molecules ◽  
2020 ◽  
Vol 25 (3) ◽  
pp. 732 ◽  
Author(s):  
Guangdong Li ◽  
Xiaoping Zou ◽  
Jin Cheng ◽  
Dan Chen ◽  
Yujun Yao ◽  
...  
Keyword(s):  
Solar Cells ◽  
Film Formation ◽  
Photophysical Properties ◽  
Perovskite Solar Cells ◽  
Precursor Solution ◽  
Solution Concentration ◽  
Precursor Solution Concentration ◽  
Composition Optimization ◽  
A Site ◽  
Low Temperature Process

In recent years, flexible perovskite solar cells have drawn tremendous attention in the field of wearable devices, and optimization of perovskite composition plays an important role in improving film quality and photophysical properties. At present, some researchers have only studied A-site organic cations mixing or X-site halide anions mixing in the ABX3 structure of perovskite, but there are few reports on co-mixing of A-site and X-site ions in flexible perovskite solar cells. In this paper, we mainly try to study the effects of different concentrations of mixed formamidine methylamine halide (FAxMA1-xBrxClyI1-x-y) precursor solutions on the quality and photophysical properties of perovskite films under low temperature process. We conclude that the film quality and photophysical properties reached the best results when the optimized precursor solution concentration was 60:6:6. The investigation on composition optimization in this experiment laid the foundation for the improvement of the performance of flexible perovskite solar cells. We also use the results of this experiment to prepare flexible perovskite solar cells based on carbon electrodes, which are expected to be applied in other flexible optoelectronic or electro-optical devices.

Low Temperature SiO2 Film Formation by Microwaｖe Plasma Assisted Reactive Beam Deposition

1985 ◽  
Author(s):  
Eiichi Murakami ◽  
Shin-ichiro Kimura ◽  
Terunori Warabisako ◽  
Kiyoshi Miyake ◽  
Hideo Sunami
Keyword(s):  
Low Temperature ◽  
Microwave Plasma ◽  
Film Formation ◽  
Sio2 Film ◽  
Beam Deposition

SiO2 film formation by CO2 laser PVD with O2 feeding

1990 ◽  
Author(s):  
A. Shuhara ◽  
N. Ohmori ◽  
T. Takayama ◽  
M. Ohmine ◽  
K. Oka ◽  
...  
Keyword(s):  
Co2 Laser ◽  
Film Formation ◽  
Sio2 Film

Structural Evolution and Mechanical Behavior of Bio-inspired Oxide Films on Self-Assembled Organic Layers

2006 ◽  
Vol 975 ◽  
Author(s):  
Guangneng Zhang ◽  
Junghyun Cho
Keyword(s):  
Electron Microscope ◽  
Mechanical Performance ◽  
Film Formation ◽  
Oxide Films ◽  
Structural Evolution ◽  
Precursor Solution ◽  
Nucleation And Growth ◽  
Structure Property ◽  
Organic Layers ◽  
Self Assembled

ABSTRACTA bio-inspired approach is employed to deposit the oxide films on the substrates coated with self-assembled organic layers. Particularly, titania and zirconia films are grown in aqueous precursor solutions at near room temperatures. This process, directed by the nanoscale organic template, mimics the controlled nucleation and growth of the biominerals such as bones and teeth. Multiscale structural evolution resulting from initial bulk nucleation, nanoparticle aggregation, and ultimate film formation are systematically studied by adjusting the precursor solution conditions. Dynamic light scattering (DLS) is utilized to characterize initial nanoparticles and their associated aggregates/clusters formed in situ in solution. Corresponding nano- and microstructure developments of the oxide films are investigated through high-resolution transmission electron microscope (TEM) and scanning electron microscope (SEM). In addition, mechanical performance is evaluated with the aid of a dynamic nanoindentation testing to establish the structure-property relationships of the bio-inspired oxide films. The goal of this study is to have a capability to tailor microstructures and mechanical behaviors by identifying the controlling mechanisms responsible for nucleation and growth of such oxide films.

A Selective SiO2 Film‐Formation Technology Using Liquid‐Phase Deposition for Fully Planarized Multilevel Interconnections

1993 ◽  
Vol 140 (8) ◽  
pp. 2410-2414 ◽  
Author(s):  
Tetsuya Homma ◽  
Takuya Katoh ◽  
Yoshiaki Yamada ◽  
Yukinobu Murao
Keyword(s):  
Liquid Phase ◽  
Film Formation ◽  
Sio2 Film ◽  
Liquid Phase Deposition

Preparation of Ceramic Honeycomb Filter Supported Zeolite Membrane Modules by Microwave-Assisted In-Situ Crystallization

2006 ◽  
Vol 317-318 ◽  
pp. 697-700 ◽  
Author(s):  
C.D. Madhusoodana ◽  
Rathindra Nath Das ◽  
Yoshikazu Kameshima ◽  
Kiyoshi Okada
Keyword(s):  
Microwave Heating ◽  
Film Formation ◽  
Precursor Solution ◽  
Zeolite Membrane ◽  
Bet Surface Area ◽  
Microwave Assisted ◽  
In Situ Crystallization ◽  
Membrane Modules ◽  
Ceramic Honeycomb

Ceramic honeycomb filter supported zeolite membrane modules were prepared by a novel microwave-assisted in-situ crystallization method. The synthesis was done in two stages; microwave heating of substrates saturated with precursor solution to form a thin layer of zeolite nuclei (seeds) on the porous substrates followed by hydrothermal treatment to crystallize the ZSM-5 zeolite on the substrates. Zeolite formation was significantly enhanced by comparison with the conventional hydrothermal method, as evident from XRD and BET surface area results. The degree of film formation was varied with varying the dipping time of the substrates in the precursor solution prior to microwave heating, thereby controlling film formation inside the pores of the substrates. This new method of seeding using a simple domestic microwave oven was employed to zeolite membrane modules by forming a zeolite film on the thin walls of a honeycomb filter. The permeability of single gases and the separation of mixed gases were evaluated, showing a low pressure-drop and high permeating flux of light molecule gases.

Quantitative and nondestructive determination of residual stress for SiO2 thin film by laser-generated surface acoustic wave technique

2021 ◽  
Author(s):  
Li Zhang ◽  
Xia Xiao ◽  
Haiyang Qi ◽  
Yiting Huang ◽  
Huiquan Qin
Keyword(s):  
Thin Film ◽  
Mechanical Properties ◽  
Residual Stress ◽  
Integrated Circuits ◽  
Acoustic Wave ◽  
Dispersion Curve ◽  
Surface Acoustic Wave ◽  
Physical And Mechanical Properties ◽  
Sio2 Film ◽  
Sio2 Films

Abstract The laser-generated surface acoustic wave (SAW) technique is a promising method to measure the mechanical properties of thin films quickly and nondestructively. Residual stress is inevitable during the processing and manufacturing of integrated circuits, which will have a major impact on the physical and mechanical properties of the thin film materials and cause deterioration to the structural strength. In this study, the SAW technique based method is proposed for quantitative and nondestructive measuring the residual stress in the nanostructured films. The method is verified by the experiment measuring the SiO2 films in the thickness range of 100 to 2000 nm. The experimental procedures, including signal excitation, reception and processing, are described in detail. By matching the SAW experimental dispersion curve with the calculated theoretical dispersion curve containing the residual stress, the residual stress of the SiO2 films along [110] and [100] crystallographic orientation of the Si wafer is successfully quantified. The determination results are ranged from -65.5 to 421.1 MPa and the stress value increases as the film thickness decreases, revealing the residual stress of the SiO2 film is compressive. Meanwhile, the conventional substrate curvature method as a comparison is used to verify the correctness and feasibility of the proposed SAW method for the residual stress determination.

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