A Selective SiO2 Film‐Formation Technology Using Liquid‐Phase Deposition for Fully Planarized Multilevel Interconnections

1993 ◽  
Vol 140 (8) ◽  
pp. 2410-2414 ◽  
Author(s):  
Tetsuya Homma ◽  
Takuya Katoh ◽  
Yoshiaki Yamada ◽  
Yukinobu Murao
Keyword(s):  
Liquid Phase ◽  
Film Formation ◽  
Sio2 Film ◽  
Liquid Phase Deposition

Fabrication of TiO2 and SiO2 Thin Films by Room Temperature Liquid Phase Deposition

2007 ◽  
Author(s):  
Santosh K. Tiwari ◽  
Brian K. Paul
Keyword(s):  
Liquid Phase ◽  
Colloidal Suspensions ◽  
Sio2 Film ◽  
Index Of Refraction ◽  
Liquid Phase Deposition ◽  
Microstructural Evaluation ◽  
Optical Profilometer ◽  
Temperature Liquid ◽  
Deposited Films ◽  
Dense Titanium

Mesoporous and dense titanium dioxide (TiO2) and silicon dioxide (SiO2) films were deposited directly from nanoparticle colloidal suspensions on quartz using a liquid phase deposition technique. The quartz surface was pre-treated with an -OH group to activate the deposition surface for crack-free adhesion. The deposited films were characterized with the help of scanning electron microscope for microstructural evaluation. An optical profilometer was used to measure the optical properties of the SiO2 film. The reflectance and transmittance patterns of the film were analyzed to determine the index of refraction of the film.

Formation of SiO2 film on plastic substrate by LPD (liquid phase deposition) method

Vacuum ◽  
1991 ◽  
Vol 42 (16) ◽  
pp. 1068
Author(s):  
Masaki Kitaoka ◽  
Hisao Honda ◽  
Harunobu Yoshida ◽  
Akio Takigawa ◽  
Hideo Kawahara
Keyword(s):  
Liquid Phase ◽  
Sio2 Film ◽  
Plastic Substrate ◽  
Liquid Phase Deposition ◽  
Deposition Method

Photoelectrochemical Properties of Anatase TiO2 Films Prepared by Improved Liquid Phase Deposition

2015 ◽  
Vol 1120-1121 ◽  
pp. 419-423
Author(s):  
Cai Xia Lei ◽  
X.L. Jiang ◽  
Y. Liu ◽  
X. Liu ◽  
Y.T. Ma ◽  
...  
Keyword(s):  
Electron Microscope ◽  
Liquid Phase ◽  
Scanning Electron Microscope ◽  
Reaction Temperature ◽  
White Light ◽  
Photoelectrochemical Properties ◽  
Liquid Phase Deposition ◽  
X Ray ◽  
Good Crystallinity ◽  
Scanning Electron

In this paper, the hydrothermal-assisted liquid phase deposition (HT-LPD) method has been developed to prepare TiO2 films. The crystalline structures and morphologies of as-prepared TiO2 films were analyzed using an X-ray diffractometer (XRD) and scanning electron microscope (SEM). It was found that the HT-LPD TiO2 film showed good crystallinity with preferrred orientation along c-axis. Moreover, the as-prepared TiO2 films consisted of two layers, with the tiny nanoparticles as the underlying layer and the flower-like clusters as the upper layer. The photoelectrochemical measurements revealed that, when illuminated by the white light, the HT-LPD TiO2 films exhibited a more negative photopotential value and an increased photocurrent value with elevated reaction temperature, excepting for the sample prerared at 150 °C. In summary, the TiO2 films prepared by the improved LPD method could be served as the promising photoanode for the photoelectrochemical applications.

SrTiO3 Functional Ceramics Thin Film Prepared by Self-Assembled Monolayers with the Liquid Phase Deposition Method on Silicon Substrates

2010 ◽  
Vol 105-106 ◽  
pp. 270-273
Author(s):  
Hui Jun Ren ◽  
Guo Qiang Tan ◽  
Hong Yan Miao ◽  
Ya Yu Song ◽  
Ao Xia
Keyword(s):  
Thin Film ◽  
Contact Angle ◽  
Liquid Phase ◽  
Deposition Temperature ◽  
Precursor Solution ◽  
Self Assembled Monolayers ◽  
Silicon Substrates ◽  
Liquid Phase Deposition ◽  
Assembled Monolayers ◽  
Surface Contact Angle

In this article, (NH4)2TiF6, SrNO3 and H3BO3 were used as raw materials to prepare the precursor solution with the ratio of AHFT/SN/BA=1:1:3. The thin films of SrTiO3 were fabricated on the functional silicon substrates (100) by self-assembled monolayers (SAMs) with the liquid phase deposition (LPD). This article also studied the effects of wet state and the deposition temperature of the precursor solution before and after the functionalization of silicon substrate on the thin film growth. The results indicated that after the immersion in OTS for 30min, the surface contact angle of the silicon substrate changed from 24.64° to 100.91°. The substrate appeared hydrophobic property and it was irradiated by UV light for 30min. Then the surface contact angle of the substrate decreased to 5.00°. The substrate appeared hydrophilicity. The concentration of the precursor solution was 0.025 mol/L, the deposition temperature was 40°C and the deposition time was 9h, which were all helpful to SrTiO3 crystallization. XRD and SEM were used to characterize the physical phase of thin film and surface morphology at 600 °C with annealing and heat retaining for 2h. The results indicated that the thin film prepared by the mono-crystal Si substrate was SrTiO3 thin film with better crystalline. On the crystal surfaces of (110), (100), (200) and (211), there appeared the obvious diffraction peaks. The SrTiO3 grains on the surface had the clear outline and were regular and long columnar crystals.

Liquid phase deposition of iron and cobalt doped TiO2 epitaxial thin films

2008 ◽  
Vol 205 (10) ◽  
pp. 2405-2408 ◽  
Author(s):  
K. Y. S. Chan ◽  
G. K. L. Goh ◽  
M. Y. Han
Keyword(s):  
Thin Films ◽  
Liquid Phase ◽  
Epitaxial Thin Films ◽  
Liquid Phase Deposition ◽  
Doped Tio2

Properties of double-layer Al2O3/TiO2 antireflection coatings by liquid phase deposition

2015 ◽  
Vol 584 ◽  
pp. 248-252 ◽  
Author(s):  
Dong-Sing Wuu ◽  
Che-Chun Lin ◽  
Chao-Nan Chen ◽  
Hong-Hsiu Lee ◽  
Jung-Jie Huang
Keyword(s):  
Liquid Phase ◽  
Double Layer ◽  
Liquid Phase Deposition ◽  
Antireflection Coatings
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