Piezoelectric Zinc Oxide and Aluminum Nitride Films for MicroŽuidic and Biosensing Applications

A 2015 perspective on the nature of the steady-state and transient electron transport within the wurtzite phases of gallium nitride, aluminum nitride, indium nitride, and zinc oxide: a critical and retrospective review

Journal of Materials Science Materials in Electronics ◽

10.1007/s10854-015-3055-7 ◽

2015 ◽

Vol 26 (7) ◽

pp. 4475-4512 ◽

Cited By ~ 16

Author(s):

Poppy Siddiqua ◽

Walid A. Hadi ◽

Michael S. Shur ◽

Stephen K. O’Leary

Keyword(s):

Zinc Oxide ◽

Gallium Nitride ◽

Steady State ◽

Electron Transport ◽

Aluminum Nitride ◽

Retrospective Review ◽

Indium Nitride

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Substrate surface polariton splitting due to thin zinc oxide and aluminum nitride films presence

Applied Surface Science ◽

10.1016/j.apsusc.2012.07.157 ◽

2013 ◽

Vol 267 ◽

pp. 93-96 ◽

Cited By ~ 4

Author(s):

N.N. Novikova ◽

V.A. Yakovlev ◽

E.A. Vinogradov ◽

S.S. Ng ◽

Z. Hassan ◽

...

Keyword(s):

Zinc Oxide ◽

Aluminum Nitride ◽

Substrate Surface ◽

Surface Polariton

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Design and Analysis of MEMS Based Aluminum Nitride (AlN), Lithium Niobate (LiNbO<sub>3</sub>) and Zinc Oxide (ZnO) Cantilever with Different Substrate Materials for Piezoelectric Vibration Energy Harvesters Using COMSOL Multiphysics Software

Open Journal of Applied Sciences ◽

10.4236/ojapps.2019.94016 ◽

2019 ◽

Vol 09 (04) ◽

pp. 181-197

Author(s):

Ahmad M. Alsaad ◽

Ahmad A. Ahmad ◽

Qais M. Al-Bataineh ◽

Nermeen S. Daoud ◽

Mais H. Khazaleh

Keyword(s):

Zinc Oxide ◽

Lithium Niobate ◽

Aluminum Nitride ◽

Vibration Energy ◽

Comsol Multiphysics ◽

Energy Harvesters ◽

Piezoelectric Vibration

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Aluminum-nitride codoped zinc oxide films prepared using a radio-frequency magnetron cosputtering system

Journal of Applied Physics ◽

10.1063/1.2768010 ◽

2007 ◽

Vol 102 (3) ◽

pp. 033516 ◽

Cited By ~ 21

Author(s):

Day-Shan Liu ◽

Chia-Sheng Sheu ◽

Ching-Ting Lee

Keyword(s):

Zinc Oxide ◽

Aluminum Nitride ◽

Radio Frequency ◽

Oxide Films ◽

Radio Frequency Magnetron ◽

Zinc Oxide Films

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Micro Free-Form Fabrication of Aluminum Nitride and Zinc Oxide

Japanese Journal of Applied Physics ◽

10.1143/jjap.37.6128 ◽

1998 ◽

Vol 37 (Part 1, No. 11) ◽

pp. 6128-6134 ◽

Cited By ~ 3

Author(s):

Naoto Otake ◽

Lisheng Liu ◽

Toshiyuki Yasuhara ◽

Kazunori Kato

Keyword(s):

Zinc Oxide ◽

Aluminum Nitride ◽

Free Form

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Photoluminescence Properties of Zinc Oxide Film with Local Epitaxial Growth on Silicon Using Aluminum Nitride Buffer Layer

Acta Physica Polonica A ◽

10.12693/aphyspola.137.1110 ◽

2020 ◽

Vol 137 (6) ◽

pp. 1110-1115

Author(s):

Liu Li ◽

Liu Sha ◽

Yang Yuan

Keyword(s):

Zinc Oxide ◽

Oxide Film ◽

Aluminum Nitride ◽

Epitaxial Growth ◽

Buffer Layer ◽

Zinc Oxide Film ◽

Photoluminescence Properties

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Mass sensitivity of thin film bulk acoustic resonator sensors based on polarc-axis tilted zinc oxide and aluminum nitride thin film

Journal of Applied Physics ◽

10.1063/1.3483245 ◽

2010 ◽

Vol 108 (10) ◽

pp. 104510 ◽

Cited By ~ 15

Author(s):

Lifeng Qin ◽

Qing-Ming Wang

Keyword(s):

Thin Film ◽

Zinc Oxide ◽

Aluminum Nitride ◽

Acoustic Resonator ◽

Mass Sensitivity ◽

Film Bulk Acoustic Resonator ◽

Film Bulk

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Irradiation Testing of Piezoelectric (Aluminum Nitride, Zinc Oxide, and Bismuth Titanate) and Magnetostrictive Sensors (Remendur and Galfenol)

IEEE Transactions on Nuclear Science ◽

10.1109/tns.2017.2775163 ◽

2018 ◽

Vol 65 (1) ◽

pp. 533-538 ◽

Cited By ~ 10

Author(s):

B. Reinhardt ◽

J. Daw ◽

B. R. Tittmann

Keyword(s):

Zinc Oxide ◽

Aluminum Nitride ◽

Bismuth Titanate

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Impact of aluminum nitride as an insulator on the performance of zinc oxide thin film transistors

Applied Physics Letters ◽

10.1063/1.2890034 ◽

2008 ◽

Vol 92 (9) ◽

pp. 093509 ◽

Cited By ~ 24

Author(s):

M. M. De Souza ◽

S. Jejurikar ◽

K. P. Adhi

Keyword(s):

Thin Film ◽

Zinc Oxide ◽

Aluminum Nitride ◽

Thin Film Transistors ◽

Oxide Thin Film ◽

Zinc Oxide Thin Film

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Identification and characterization of point defects in aluminum nitride and zinc oxide crystals

10.33915/etd.2705 ◽

2008 ◽

Author(s):

Sean M. Evans

Keyword(s):

Zinc Oxide ◽

Aluminum Nitride ◽

Point Defects ◽

Oxide Crystals ◽

Identification And Characterization

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Piezoelectric Zinc Oxide and Aluminum Nitride Films for Microuidic and Biosensing Applications

A 2015 perspective on the nature of the steady-state and transient electron transport within the wurtzite phases of gallium nitride, aluminum nitride, indium nitride, and zinc oxide: a critical and retrospective review

Substrate surface polariton splitting due to thin zinc oxide and aluminum nitride films presence

Design and Analysis of MEMS Based Aluminum Nitride (AlN), Lithium Niobate (LiNbO<sub>3</sub>) and Zinc Oxide (ZnO) Cantilever with Different Substrate Materials for Piezoelectric Vibration Energy Harvesters Using COMSOL Multiphysics Software

Aluminum-nitride codoped zinc oxide films prepared using a radio-frequency magnetron cosputtering system

Micro Free-Form Fabrication of Aluminum Nitride and Zinc Oxide

Photoluminescence Properties of Zinc Oxide Film with Local Epitaxial Growth on Silicon Using Aluminum Nitride Buffer Layer

Mass sensitivity of thin film bulk acoustic resonator sensors based on polarc-axis tilted zinc oxide and aluminum nitride thin film

Irradiation Testing of Piezoelectric (Aluminum Nitride, Zinc Oxide, and Bismuth Titanate) and Magnetostrictive Sensors (Remendur and Galfenol)

Impact of aluminum nitride as an insulator on the performance of zinc oxide thin film transistors

Identification and characterization of point defects in aluminum nitride and zinc oxide crystals

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Piezoelectric Zinc Oxide and Aluminum Nitride Films for Microuidic and Biosensing Applications

A 2015 perspective on the nature of the steady-state and transient electron transport within the wurtzite phases of gallium nitride, aluminum nitride, indium nitride, and zinc oxide: a critical and retrospective review

Substrate surface polariton splitting due to thin zinc oxide and aluminum nitride films presence

Design and Analysis of MEMS Based Aluminum Nitride (AlN), Lithium Niobate (LiNbO<sub>3</sub>) and Zinc Oxide (ZnO) Cantilever with Different Substrate Materials for Piezoelectric Vibration Energy Harvesters Using COMSOL Multiphysics Software

Aluminum-nitride codoped zinc oxide films prepared using a radio-frequency magnetron cosputtering system

Micro Free-Form Fabrication of Aluminum Nitride and Zinc Oxide

Photoluminescence Properties of Zinc Oxide Film with Local Epitaxial Growth on Silicon Using Aluminum Nitride Buffer Layer

Mass sensitivity of thin film bulk acoustic resonator sensors based on polarc-axis tilted zinc oxide and aluminum nitride thin film

Irradiation Testing of Piezoelectric (Aluminum Nitride, Zinc Oxide, and Bismuth Titanate) and Magnetostrictive Sensors (Remendur and Galfenol)

Impact of aluminum nitride as an insulator on the performance of zinc oxide thin film transistors

Identification and characterization of point defects in aluminum nitride and zinc oxide crystals

Piezoelectric Zinc Oxide and Aluminum Nitride Films for Microuidic and Biosensing Applications