Aluminum-nitride codoped zinc oxide films prepared using a radio-frequency magnetron cosputtering system

2007 ◽  
Vol 102 (3) ◽  
pp. 033516 ◽  
Author(s):  
Day-Shan Liu ◽  
Chia-Sheng Sheu ◽  
Ching-Ting Lee
Keyword(s):  
Zinc Oxide ◽  
Aluminum Nitride ◽  
Radio Frequency ◽  
Oxide Films ◽  
Radio Frequency Magnetron ◽  
Zinc Oxide Films

Oxygen effect in radio frequency magnetron sputtered aluminium doped zinc oxide films

2014 ◽  
Vol 562 ◽  
pp. 70-74 ◽  
Author(s):  
Saad Rahmane ◽  
Mohamed Abdou Djouadi ◽  
Mohamed Salah Aida ◽  
Nicolas Barreau
Keyword(s):  
Zinc Oxide ◽  
Radio Frequency ◽  
Oxide Films ◽  
Radio Frequency Magnetron ◽  
Oxygen Effect ◽  
Zinc Oxide Films

scholarly journals Arsenic doped p-type zinc oxide films grown by radio frequency magnetron sputtering

2009 ◽  
Vol 106 (7) ◽  
pp. 073709 ◽  
Author(s):  
J. C. Fan ◽  
C. Y. Zhu ◽  
S. Fung ◽  
Y. C. Zhong ◽  
K. S. Wong ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Oxide Films ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Zinc Oxide Films ◽  
P Type
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