Design and Analysis of MEMS Based Aluminum Nitride (AlN), Lithium Niobate (LiNbO<sub>3</sub>) and Zinc Oxide (ZnO) Cantilever with Different Substrate Materials for Piezoelectric Vibration Energy Harvesters Using COMSOL Multiphysics Software
Keyword(s):
2021 ◽
pp. 1045389X2110322
2018 ◽
Vol 27
(7)
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pp. 075053
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Keyword(s):
Keyword(s):
2014 ◽
Vol 953-954
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pp. 655-658
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2015 ◽
Vol 52-53
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pp. 672-684
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