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2016 ◽  
Vol 16 (11) ◽  
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Author(s):  
Gyuhyun Choi ◽  
Sechan Kim ◽  
Haegyu Jang ◽  
Heeyeop Chae ◽  
Nae-Eung Lee
Keyword(s):  
Capacitively Coupled ◽  
Hard Mask ◽  
Si3n4 Layer ◽  
Multi Level ◽  
Coupled Plasmas

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Wei Jiang ◽  
Xiao-Song Li ◽  
Wen-Qi Lu ◽  
You-Nian Wang
Keyword(s):  
Low Pressure ◽  
Diagnostic Methods ◽  
Capacitively Coupled ◽  
Coupled Plasmas

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2011 ◽  
Vol 99 (2) ◽  
pp. 021501 ◽  
Author(s):  
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Shahid Rauf ◽  
Ken Collins
Keyword(s):  
Phase Lag ◽  
Capacitively Coupled ◽  
Coupled Plasmas

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Tianxiang Zhang ◽  
Hanlei Lin ◽  
Hao Wu ◽  
Qiang Zhang
Keyword(s):  
Magnetic Field ◽  
Secondary Electron ◽  
Asymmetry Effect ◽  
Capacitively Coupled ◽  
Coupled Plasmas

Resonant sheath heating in weakly magnetized capacitively coupled plasmas due to electron-cyclotron motion

2021 ◽  
Vol 104 (4) ◽  
Author(s):  
Quan-Zhi Zhang ◽  
Jing-Yu Sun ◽  
Wen-Qi Lu ◽  
Julian Schulze ◽  
Yu-Qing Guo ◽  
...  
Keyword(s):  
Electron Cyclotron ◽  
Cyclotron Motion ◽  
Capacitively Coupled ◽  
Coupled Plasmas
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