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2016 ◽  
Vol 16 (5) ◽  
pp. 5143-5149 ◽  
Author(s):  
Sechan Kim ◽  
Gyuhyun Choi ◽  
Heeyeop Chae ◽  
Nae-Eung Lee
Keyword(s):  
Capacitively Coupled ◽  
Nano Scale ◽  
Multi Level ◽  
Coupled Plasmas

Patterning of Si3N4 Layer in Pulse-Biased Capacitively-Coupled Plasmas for Multi-Level Hard Mask Structures

2016 ◽  
Vol 16 (11) ◽  
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Author(s):  
Gyuhyun Choi ◽  
Sechan Kim ◽  
Haegyu Jang ◽  
Heeyeop Chae ◽  
Nae-Eung Lee
Keyword(s):  
Capacitively Coupled ◽  
Hard Mask ◽  
Si3n4 Layer ◽  
Multi Level ◽  
Coupled Plasmas

An overview of diagnostic methods of low-pressure capacitively coupled plasmas

2012 ◽  
Vol 521 ◽  
pp. 141-145 ◽  
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Yong-Xin Liu ◽  
Wei Jiang ◽  
Xiao-Song Li ◽  
Wen-Qi Lu ◽  
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Keyword(s):  
Low Pressure ◽  
Diagnostic Methods ◽  
Capacitively Coupled ◽  
Coupled Plasmas

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2011 ◽  
Vol 99 (2) ◽  
pp. 021501 ◽  
Author(s):  
Ankur Agarwal ◽  
Shahid Rauf ◽  
Ken Collins
Keyword(s):  
Phase Lag ◽  
Capacitively Coupled ◽  
Coupled Plasmas

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2021 ◽  
Vol 28 (12) ◽  
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Author(s):  
Shali Yang ◽  
Tianxiang Zhang ◽  
Hanlei Lin ◽  
Hao Wu ◽  
Qiang Zhang
Keyword(s):  
Magnetic Field ◽  
Secondary Electron ◽  
Asymmetry Effect ◽  
Capacitively Coupled ◽  
Coupled Plasmas

Resonant sheath heating in weakly magnetized capacitively coupled plasmas due to electron-cyclotron motion

2021 ◽  
Vol 104 (4) ◽  
Author(s):  
Quan-Zhi Zhang ◽  
Jing-Yu Sun ◽  
Wen-Qi Lu ◽  
Julian Schulze ◽  
Yu-Qing Guo ◽  
...  
Keyword(s):  
Electron Cyclotron ◽  
Cyclotron Motion ◽  
Capacitively Coupled ◽  
Coupled Plasmas
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