An overview of diagnostic methods of low-pressure capacitively coupled plasmas

Thin Solid Films ◽

10.1016/j.tsf.2012.02.016 ◽

2012 ◽

Vol 521 ◽

pp. 141-145 ◽

Cited By ~ 1

Author(s):

Yong-Xin Liu ◽

Wei Jiang ◽

Xiao-Song Li ◽

Wen-Qi Lu ◽

You-Nian Wang

Keyword(s):

Low Pressure ◽

Diagnostic Methods ◽

Capacitively Coupled ◽

Coupled Plasmas

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Simulation of Low-Pressure Capacitively Coupled Plasmas Combining a Parallelized Particle-in-Cell Simulation and Direct Simulation of Monte Carlo

IEEE Transactions on Plasma Science ◽

10.1109/tps.2014.2368145 ◽

2014 ◽

Vol 42 (12) ◽

pp. 3819-3824 ◽

Cited By ~ 4

Author(s):

Jin Seok Kim ◽

Min Young Hur ◽

In Cheol Song ◽

Ho-Jun Lee ◽

Hae June Lee

Keyword(s):

Monte Carlo ◽

Low Pressure ◽

Direct Simulation ◽

Capacitively Coupled ◽

Particle In Cell ◽

Cell Simulation ◽

Coupled Plasmas

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Simulation of low-pressure capacitively coupled plasmas using a parallelized particle-in-cell simulation and a direct simulation of Monte Carlo for neutrals

2013 Abstracts IEEE International Conference on Plasma Science (ICOPS) ◽

10.1109/plasma.2013.6633183 ◽

2013 ◽

Author(s):

Jin Seok Kim ◽

In Cheol Song ◽

Ho-Jun Lee ◽

Hae June Lee

Keyword(s):

Monte Carlo ◽

Low Pressure ◽

Direct Simulation ◽

Capacitively Coupled ◽

Particle In Cell ◽

Cell Simulation ◽

Coupled Plasmas

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Kinetic effects in low pressure capacitively coupled plasmas

2012 Abstracts IEEE International Conference on Plasma Science ◽

10.1109/plasma.2012.6383882 ◽

2012 ◽

Author(s):

P. H. Stoltz ◽

A. Likhanskii ◽

P. Neilson

Keyword(s):

Low Pressure ◽

Capacitively Coupled ◽

Kinetic Effects ◽

Coupled Plasmas

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Charged particle dynamics and distribution functions in low pressure dual-frequency capacitively coupled plasmas operated at low frequencies and high voltages

Plasma Sources Science and Technology ◽

10.1088/1361-6595/ab9374 ◽

2020 ◽

Vol 29 (7) ◽

pp. 075014 ◽

Cited By ~ 1

Author(s):

P Hartmann ◽

L Wang ◽

K Nösges ◽

B Berger ◽

S Wilczek ◽

...

Keyword(s):

Charged Particle ◽

Low Pressure ◽

Particle Dynamics ◽

Distribution Functions ◽

Dual Frequency ◽

Low Frequencies ◽

Capacitively Coupled ◽

Coupled Plasmas

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Modulation of uniform magnetic field on electron dynamics in low‐pressure capacitively coupled plasmas

Plasma Processes and Polymers ◽

10.1002/ppap.202100072 ◽

2021 ◽

Author(s):

Yu‐Qing Guo ◽

Jing‐Yu Sun ◽

Quan‐Zhi Zhang ◽

Fang‐Fang Ma ◽

Xiang‐Mei Liu ◽

...

Keyword(s):

Magnetic Field ◽

Uniform Magnetic Field ◽

Low Pressure ◽

Electron Dynamics ◽

Capacitively Coupled ◽

Coupled Plasmas

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Efficient GPU implementation of the Particle-in-Cell/Monte-Carlo collisions method for 1D simulation of low-pressure capacitively coupled plasmas

Computer Physics Communications ◽

10.1016/j.cpc.2021.107913 ◽

2021 ◽

pp. 107913

Author(s):

Zoltan Juhasz ◽

Ján Ďurian ◽

Aranka Derzsi ◽

Štefan Matejčík ◽

Zoltán Donkó ◽

...

Keyword(s):

Monte Carlo ◽

Low Pressure ◽

Capacitively Coupled ◽

Particle In Cell ◽

Coupled Plasmas ◽

Gpu Implementation

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On uniformity and non-local transport in low pressure capacitively coupled plasmas

Plasma Sources Science and Technology ◽

10.1088/1361-6595/abac4a ◽

2020 ◽

Vol 29 (9) ◽

pp. 095019

Author(s):

Shahid Rauf

Keyword(s):

Low Pressure ◽

Capacitively Coupled ◽

Non Local ◽

Local Transport ◽

Coupled Plasmas

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Intrasheath electron dynamics in low pressure capacitively coupled plasmas

Plasma Sources Science and Technology ◽

10.1088/1361-6595/abe728 ◽

2021 ◽

Author(s):

Mate Vass ◽

Aranka Derzsi ◽

Julian Schulze ◽

Zoltan Donko

Keyword(s):

Low Pressure ◽

Electron Dynamics ◽

Capacitively Coupled ◽

Coupled Plasmas

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Modeling and experimental investigation of the plasma uniformity in CF4/O2 capacitively coupled plasmas, operating in single frequency and dual frequency regime

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.4906819 ◽

2015 ◽

Vol 33 (2) ◽

pp. 021310 ◽

Cited By ~ 2

Author(s):

Yu-Ru Zhang ◽

Stefan Tinck ◽

Peter De Schepper ◽

You-Nian Wang ◽

Annemie Bogaerts

Keyword(s):

Experimental Investigation ◽

Single Frequency ◽

Dual Frequency ◽

Capacitively Coupled ◽

Frequency Regime ◽

Coupled Plasmas

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Modelling of electron kinetics in low-pressure inductively coupled plasmas

International Conference on Plasma Science (papers in summary form only received) ◽

10.1109/plasma.1995.531593 ◽

1995 ◽

Cited By ~ 1

Author(s):

V.I. Kolobov ◽

G.J. Parker ◽

W.N.G. Hitchon

Keyword(s):

Low Pressure ◽

Inductively Coupled Plasmas ◽

Electron Kinetics ◽

Inductively Coupled ◽

Coupled Plasmas

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