scholarly journals Characterization of Patterned Porous Low-kDielectrics: Surface Sealing and Residue Removal by Wet Processing/Cleaning

2016 ◽  
Vol 5 (3) ◽  
pp. N5-N9 ◽  
Author(s):  
Q. T. Le ◽  
E. Kesters ◽  
S. Decoster ◽  
B. T. Chan ◽  
M. P. Nguyen ◽  
...  
2020 ◽  
Vol 57 (12) ◽  
pp. 4481-4491 ◽  
Author(s):  
Ana Cláudia Alencar Lopes ◽  
Rafaela Pereira Andrade ◽  
Lauany Caroline Carvalho de Oliveira ◽  
Lidiany Mendonça Zacaroni Lima ◽  
Wilder Douglas Santiago ◽  
...  
Keyword(s):  

DYNA ◽  
2021 ◽  
Vol 88 (217) ◽  
pp. 97-102
Author(s):  
Joez André de Moraes Rodrigues ◽  
Thais Emanuelle Monteiro dos Santos ◽  
Edivan Rodrigues de Souza ◽  
Marcelo Metri Corrêa ◽  
Brivaldo Gomes de Almeida ◽  
...  

The lack of cover is one of the main accelerators of soil degradation. Without protection and exposed to rainfall, the soil breaks the particles, causing surface sealing, making infiltration difficult. This study characterizes surface sealing and hydraulic erosion in Ultisols of the Alto Ipanema Basin. Eight erosion plots were established under the treatments: bare soil and soil with Brachiaria decumbens mulch. Three rain events were simulated at 24-hour intervals, with an intensity of 54.63 mmh-1. After each simulation, the surface micromorphology and the amount of soil lost were investigated. The use of mulch reduced runoff by 42% and the loss of soil and the rate of disaggregation was reduced by 70% on average. Infiltration was increased by 242%. Mulch was effective in preserving soil porosity and microstructure for the first simulated rainfall event (0 h), but was not observed in the second (24 h) and third (48 h) rainfall events.


2001 ◽  
Vol 4 (3) ◽  
pp. 217-222 ◽  
Author(s):  
S. López-Esteban ◽  
J.F. Bartolomé ◽  
C. Pecharromán ◽  
S.R.H. Mello Castanho ◽  
J.S. Moya

2016 ◽  
Vol 255 ◽  
pp. 227-231
Author(s):  
Quoc Toan Le ◽  
Els Kesters ◽  
I. Hoflijk ◽  
T. Conard ◽  
M. Shen ◽  
...  

For patterned TiN/silicon oxide/low-k dielectric stack, fluorinated etch residues were detected on the TiN surface, the dielectric sidewall and bottom, regardless of the low-k material used in the stack. XPS results showed that they consisted of polymer-based (CFx) residues deposited on trench sidewall and bottom, and metal-based (TiFx) residues mainly deposited on top surface. In terms of post-etch residue removal, the efficiency of various wet clean solutions can be clearly distinguished for CFx, and TiFx using the same patterned porous low-k stack. These results also demonstrate that the removal of both TiFx and CFx residues generated during the plasma is possible in one step with optimized chemical and process.


2014 ◽  
Vol 2014 ◽  
pp. 1-9 ◽  
Author(s):  
Shalini Singh ◽  
Sanamdeep Singh ◽  
Vrinda Bali ◽  
Lovleen Sharma ◽  
Jyoti Mangla

The study aimed at isolation and screening of fungal amylase producer, optimization of solid state fermentation conditions for maximum amylase production by the best amylase producer, and characterization of the crude amylases, so produced.Aspergillus fumigatusNTCC1222 showed the highest amylase activity (164.1 U/mL) in secondary screening under SSF conditions and was selected for further studies. The test strain showed maximum amylase production (341.7 U/mL) and supernatant protein concentration (9.7 mg/mL) for incubation period (6 days), temperature (35°C), initial pH (6.0), nutrient salt solution as moistening agent, and beef extract as nitrogen source. Pomegranate peel produced maximum amylase activity, but wheat bran (only slightly lesser amylase activity as compared to that of pomegranate peel) was chosen for further studies, keeping in mind the seasonal availability of pomegranate peel. TLC confirmed the amylase produced to beα-type and 60 kDa was the molecular weight of the partially purified amylase. The enzyme showed maximum enzyme activity at pH 6.0, temperature of 55°C, and incubation time of 60 minutes. UV (616.0 U/mL) and chemical (814.2 U/mL) mutation enhanced amylase activity as compared to wild test strain. The study indicates thatAspergillus fumigatusNTCC1222 can be an important source of amylase and the crude enzyme, hence obtained, can be cost effectively applied in multiple sections of textile wet processing.


2012 ◽  
Vol 187 ◽  
pp. 197-200
Author(s):  
Tae Gon Kim ◽  
Quoc Toan Le ◽  
Samuel Suhard ◽  
Marcel Lux ◽  
Guy Vereecke ◽  
...  

Atomic force microscope (AFM) with inclined sample measurement and hydrophobic functionalized AFM probe was used to visualize the sidewall of low-k pattern and allowed to characterize the hydrophobic characteristics on the sidewall after low-k etch. To functionalized the AFM probe, 1H,1H,2H,2H-Perfluorodecyltrichlorosilane (FDTS) as a hydrophobic film was coated on an AFM probe. Because of the magnitude of the phobic-phobic interaction force and the tip forced to make a phase shift. Using this technique the visualization and characterization of the etch residue on the low-k sidewall can be successfully performed. It is shown that the investigation toward an effective chemical clean for the etch residue removal could be applicable.


Author(s):  
B. L. Soloff ◽  
T. A. Rado

Mycobacteriophage R1 was originally isolated from a lysogenic culture of M. butyricum. The virus was propagated on a leucine-requiring derivative of M. smegmatis, 607 leu−, isolated by nitrosoguanidine mutagenesis of typestrain ATCC 607. Growth was accomplished in a minimal medium containing glycerol and glucose as carbon source and enriched by the addition of 80 μg/ ml L-leucine. Bacteria in early logarithmic growth phase were infected with virus at a multiplicity of 5, and incubated with aeration for 8 hours. The partially lysed suspension was diluted 1:10 in growth medium and incubated for a further 8 hours. This permitted stationary phase cells to re-enter logarithmic growth and resulted in complete lysis of the culture.


Author(s):  
A.R. Pelton ◽  
A.F. Marshall ◽  
Y.S. Lee

Amorphous materials are of current interest due to their desirable mechanical, electrical and magnetic properties. Furthermore, crystallizing amorphous alloys provides an avenue for discerning sequential and competitive phases thus allowing access to otherwise inaccessible crystalline structures. Previous studies have shown the benefits of using AEM to determine crystal structures and compositions of partially crystallized alloys. The present paper will discuss the AEM characterization of crystallized Cu-Ti and Ni-Ti amorphous films.Cu60Ti40: The amorphous alloy Cu60Ti40, when continuously heated, forms a simple intermediate, macrocrystalline phase which then transforms to the ordered, equilibrium Cu3Ti2 phase. However, contrary to what one would expect from kinetic considerations, isothermal annealing below the isochronal crystallization temperature results in direct nucleation and growth of Cu3Ti2 from the amorphous matrix.


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