Low Frequency Noise Analysis of Impact of Metal Gate Processing on the Gate Oxide Stack Quality

2018 ◽  
Vol 7 (3) ◽  
pp. Q26-Q32 ◽  
Author(s):  
C. Claeys ◽  
L. He ◽  
B. J. O'Sullivan ◽  
A. Veloso ◽  
N. Horiguchi ◽  
...  
Keyword(s):  
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Low Frequency ◽  
Gate Oxide ◽  
Frequency Noise ◽  
Low Frequency Noise ◽  
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Moon Ju Cho ◽  
Hiroaki Arimura ◽  
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Noise Analysis ◽  
Low Frequency ◽  
Post Treatment ◽  
Frequency Noise ◽  
Low Frequency Noise ◽  
Metal Gate

Investigation of low-frequency noise of 28-nm technology process of high-k/metal gate p-MOSFETs with fluorine incorporation

2016 ◽  
Vol 115 ◽  
pp. 7-11
Author(s):  
Tsung-Hsien Kao ◽  
Shoou-Jinn Chang ◽  
Yean-Kuen Fang ◽  
Po-Chin Huang ◽  
Bo-Chin Wang ◽  
...  
Keyword(s):  
Low Frequency ◽  
Frequency Noise ◽  
Low Frequency Noise ◽  
Metal Gate ◽  
High K ◽  
Technology Process ◽  
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Improving Low-Frequency Noise in 14-nm FinFET by Optimized High-k/Metal Gate Thermal Processing

2021 ◽  
pp. 1-1
Author(s):  
Hao Zhu ◽  
Bin Ye ◽  
Chengkang Tang ◽  
Xianghui Li ◽  
Qingqing Sun ◽  
...  
Keyword(s):  
Thermal Processing ◽  
Low Frequency ◽  
Frequency Noise ◽  
Low Frequency Noise ◽  
Metal Gate ◽  
High K
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