Comprehensive Demonstration and Physical Origin of HfO2 Gate Stacks: Band Alignment, VFB Shift and Fermi Level Pinning
2019 ◽
Vol 123
(39)
◽
pp. 23919-23930
◽
Keyword(s):
Keyword(s):
Keyword(s):
2020 ◽
Vol 124
(27)
◽
pp. 14550-14563
Keyword(s):