Dry Etching of Nanosized Si2Sb2Te5 Patterns using TiN Hard Mask for High Density Phase-change Memory

2019 ◽  
Vol 22 (1) ◽  
pp. 145-150 ◽  
Author(s):  
Gaoming Feng ◽  
Zhitang Song ◽  
Bo Liu ◽  
Songlin Feng ◽  
Baoming Chen
Keyword(s):  
Phase Change ◽  
Phase Change Memory ◽  
Dry Etching ◽  
High Density ◽  
Hard Mask ◽  
Change Memory

Dry Etching of Nanosized Ge1Sb2Te4 Patterns Using TiN Hard Mask for High Density Phase-Change Memory

2009 ◽  
Vol 9 (2) ◽  
pp. 1526-1529 ◽  
Author(s):  
Gaoming Feng ◽  
Bo Liu ◽  
Zhitang Song ◽  
Shilong Lv ◽  
Liangcai Wu ◽  
...  
Keyword(s):  
Phase Change ◽  
Phase Change Memory ◽  
Dry Etching ◽  
High Density ◽  
Hard Mask ◽  
Change Memory

scholarly journals Ultra High Density Scanning Electrical Probe Phase-Change Memory for Archival Storage

2011 ◽  
Vol 50 (9S1) ◽  
pp. 09MD04 ◽  
Author(s):  
Lei Wang ◽  
C. David Wright ◽  
Purav Shah ◽  
Mustafa M. Aziz ◽  
Abu Sebastian ◽  
...  
Keyword(s):  
Phase Change ◽  
Phase Change Memory ◽  
High Density ◽  
Archival Storage ◽  
Electrical Probe ◽  
Change Memory

Design of Side Bottom-Electrode-Contact for High Density Phase-Change Memory Array

2012 ◽  
Vol 12 (10) ◽  
pp. 7939-7943
Author(s):  
Yan Liu ◽  
Zhitang Song ◽  
Bo Liu ◽  
Jia Xu ◽  
Houpeng Chen ◽  
...  
Keyword(s):  
Phase Change ◽  
Bottom Electrode ◽  
Phase Change Memory ◽  
High Density ◽  
Memory Array ◽  
Electrode Contact ◽  
Change Memory

Understanding the effect of dry etching on nanoscale phase-change memory

2019 ◽  
Vol 30 (49) ◽  
pp. 495202 ◽  
Author(s):  
Md Khirul Anam ◽  
Ethan C Ahn
Keyword(s):  
Phase Change ◽  
Phase Change Memory ◽  
Dry Etching ◽  
Change Memory

scholarly journals Ultra High Density Scanning Electrical Probe Phase-Change Memory for Archival Storage

2011 ◽  
Vol 50 (9) ◽  
pp. 09MD04
Author(s):  
Lei Wang ◽  
C. David Wright ◽  
Purav Shah ◽  
Mustafa M. Aziz ◽  
Abu Sebastian ◽  
...  
Keyword(s):  
Phase Change ◽  
Phase Change Memory ◽  
High Density ◽  
Archival Storage ◽  
Electrical Probe ◽  
Change Memory

1T2R Structure with Cross-Spacer for High-Density Phase Change Memory

2008 ◽  
Author(s):  
Chain-Ming Lee ◽  
Chih-Wei Chen ◽  
Wei-Su Chen ◽  
Der-Sheng Chao ◽  
Ming-Jung Chen ◽  
...  
Keyword(s):  
Phase Change ◽  
Phase Change Memory ◽  
High Density ◽  
Change Memory

Fabrication of high density nano-pillar type phase change memory devices using flexible AAO shaped template

2010 ◽  
Vol 87 (11) ◽  
pp. 2081-2084 ◽  
Author(s):  
Sung-Hoon Hong ◽  
Byeong-Ju Bae ◽  
Heon Lee ◽  
Jun-Ho Jeong
Keyword(s):  
Phase Change ◽  
Phase Change Memory ◽  
High Density ◽  
Memory Devices ◽  
Type Phase ◽  
Change Memory
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