Selective Epitaxial Growth of Si(Ge) for High Performance MOSFET Applications

2019 ◽  
Vol 16 (10) ◽  
pp. 463-473
Author(s):  
Ichiro Mizushima
Keyword(s):  
Epitaxial Growth ◽  
High Performance ◽  
Selective Epitaxial Growth

48 GHz High-Performance Ge-on-SOI Photodetector With Zero-Bias 40 Gbps Grown by Selective Epitaxial Growth

2017 ◽  
Vol 35 (24) ◽  
pp. 5306-5310 ◽  
Author(s):  
Zhi Liu ◽  
Fan Yang ◽  
Wenzhou Wu ◽  
Hui Cong ◽  
Jun Zheng ◽  
...  
Keyword(s):  
Epitaxial Growth ◽  
High Performance ◽  
Zero Bias ◽  
Selective Epitaxial Growth

Fabrication of 50 nm high performance strained-SiGe pMOSFETs with selective epitaxial growth

2004 ◽  
Vol 224 (1-4) ◽  
pp. 292-296 ◽  
Author(s):  
Roger Loo ◽  
Nadine Collaert ◽  
Peter Verheyen ◽  
Matty Caymax ◽  
Romain Delhougne ◽  
...  
Keyword(s):  
Epitaxial Growth ◽  
High Performance ◽  
Selective Epitaxial Growth ◽  
Strained Sige

Polar-Induced Selective Epitaxial Growth of Multijunction Nanoribbons for High-Performance Optoelectronics

2019 ◽  
Vol 11 (17) ◽  
pp. 15813-15820 ◽  
Author(s):  
Huawei Liu ◽  
Ying Jiang ◽  
Peng Fan ◽  
Yexin Feng ◽  
Jianyue Lan ◽  
...  
Keyword(s):  
Epitaxial Growth ◽  
High Performance ◽  
Selective Epitaxial Growth

van der Waals Epitaxial Growth of Borophene on a Mica Substrate toward a High-Performance Photodetector

2021 ◽  
Author(s):  
Zenghui Wu ◽  
Guoan Tai ◽  
Runsheng Liu ◽  
Chuang Hou ◽  
Wei Shao ◽  
...  
Keyword(s):  
Epitaxial Growth ◽  
High Performance ◽  
Van Der Waals ◽  
Mica Substrate

Thick selective epitaxial growth of silicon at 960°C using silane only

1992 ◽  
Vol 18 (3) ◽  
pp. 237-246 ◽  
Author(s):  
N. Afshar-Hanaii ◽  
J.M. Bonar ◽  
A.G.R. Evans ◽  
G.J. Parker ◽  
C.M.K. Starbuck ◽  
...  
Keyword(s):  
Epitaxial Growth ◽  
Selective Epitaxial Growth
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