Copper Precipitation in Germanium-Doped Czochralski Silicon

2019 ◽  
Vol 16 (6) ◽  
pp. 219-225
Author(s):  
Weiyan Wang ◽  
Deren Yang ◽  
Xiangyang Ma ◽  
Yuheng Zeng ◽  
Duanlin Que
Keyword(s):  
Czochralski Silicon ◽  
Copper Precipitation

Effect of intrinsic point defects on copper precipitation in large-diameter Czochralski silicon

2003 ◽  
Vol 83 (15) ◽  
pp. 3048-3050 ◽  
Author(s):  
Zhenqiang Xi ◽  
Deren Yang ◽  
Jin Xu ◽  
Yujie Ji ◽  
Duanlin Que ◽  
...  
Keyword(s):  
Point Defects ◽  
Large Diameter ◽  
Czochralski Silicon ◽  
Intrinsic Point Defects ◽  
Copper Precipitation

Copper precipitation in nitrogen-doped Czochralski silicon

2008 ◽  
Vol 104 (1) ◽  
pp. 013508 ◽  
Author(s):  
Weiyan Wang ◽  
Deren Yang ◽  
Xiangyang Ma ◽  
Duanlin Que
Keyword(s):  
Nitrogen Doped ◽  
Czochralski Silicon ◽  
Copper Precipitation

Influence of copper precipitation on oxygen precipitation in Czochralski silicon

2003 ◽  
Vol 19 (3) ◽  
pp. 299-305 ◽  
Author(s):  
Zhenqiang Xi ◽  
Deren Yang ◽  
Jun Chen ◽  
Jin Xu ◽  
Yujie Ji ◽  
...  
Keyword(s):  
Czochralski Silicon ◽  
Copper Precipitation ◽  
Oxygen Precipitation

Influence of copper precipitation on the formation of denuded zone in Czochralski silicon

2007 ◽  
Vol 102 (11) ◽  
pp. 114506 ◽  
Author(s):  
Jin Xu ◽  
Deren Yang ◽  
H. J. Moeller
Keyword(s):  
Czochralski Silicon ◽  
Copper Precipitation

Copper precipitation in large-diameter Czochralski silicon

2005 ◽  
Vol 97 (9) ◽  
pp. 094909 ◽  
Author(s):  
Zhenqiang Xi ◽  
Jun Chen ◽  
Deren Yang ◽  
A. Lawerenz ◽  
H. J. Moeller
Keyword(s):  
Large Diameter ◽  
Czochralski Silicon ◽  
Copper Precipitation
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