Characterization of Process Induced Surface Profiles and Lattice Strains using Optical Surface Profilometry and Multi-wavelength Raman Spectroscopy

2019 ◽  
Vol 13 (1) ◽  
pp. 359-366 ◽  
Author(s):  
Woo Sik Yoo ◽  
Takeshi Ueda ◽  
Junya Kajiwara ◽  
Toshikazu Ishigaki ◽  
Kitaek Kang
Keyword(s):  
Raman Spectroscopy ◽  
Optical Surface ◽  
Surface Profilometry ◽  
Lattice Strains ◽  
Multi Wavelength ◽  
Surface Profiles

Evaluation of Very High Resolution Multi-Wavelength Raman Spectroscopy for In-Line Characterization of Patterned Epitaxial Si1-xGex Layers on Si(100) Wafers

2019 ◽  
Vol 35 (2) ◽  
pp. 205-212 ◽  
Author(s):  
Victor Vartanian ◽  
Takeshi Ueda ◽  
Toshikazu Ishigaki ◽  
Kitaek Kang ◽  
Woo Sik Yoo
Keyword(s):  
Raman Spectroscopy ◽  
High Resolution ◽  
Multi Wavelength ◽  
Very High

Stress Characterization of Tungsten-Filled Through Silicon via Arrays Using Very High Resolution Multi-Wavelength Raman Spectroscopy

2019 ◽  
Vol 35 (2) ◽  
pp. 105-115 ◽  
Author(s):  
Jeff Gambino ◽  
Daniel Vanslette ◽  
Bucknell Webb ◽  
Cameron Luce ◽  
Takeshi Ueda ◽  
...  
Keyword(s):  
Raman Spectroscopy ◽  
High Resolution ◽  
Through Silicon Via ◽  
Multi Wavelength ◽  
Very High

Global and Local Stress Characterization of SiN/Si(100) Wafers Using Optical Surface Profilometer and Multiwavelength Raman Spectroscopy

2019 ◽  
Vol 35 (4) ◽  
pp. 861-871 ◽  
Author(s):  
Woo Sik Yoo ◽  
Junya Kajiwara ◽  
Takeshi Ueda ◽  
Toshikazu Ishigaki ◽  
Kitaek Kang
Keyword(s):  
Raman Spectroscopy ◽  
Local Stress ◽  
Optical Surface ◽  
Global And Local
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