Non-contact, non-destructive characterization of Ge content and SiGe layer thickness using multi-wavelength Raman spectroscopy

Author(s):  
Woo Sik Yoo ◽  
Takeshi Ueda ◽  
Toshikazu Ishigaki ◽  
Kitaek Kang
2011 ◽  
Author(s):  
Masashi Fukumoto ◽  
Noriyuki Hasuike ◽  
Hiroshi Harima ◽  
Masahiro Yoshimoto ◽  
Woo Sik Yoo ◽  
...  

2017 ◽  
Vol 25 (6) ◽  
pp. 42-47 ◽  
Author(s):  
Reeju Pokharel ◽  
Donald W. Brown ◽  
Bjørn Clausen ◽  
Darrin D. Byler ◽  
Timothy L. Ickes ◽  
...  

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