Simulation, Fabrication and Characterization of a Tunable Bragg Reflector Based on Silicon Oxide and Silicon Nitride Dielectric Films Deposited by PECVD
Keyword(s):
1991 ◽
Vol 9
(6)
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pp. 3287
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Keyword(s):
2005 ◽
Vol 2
(7)
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pp. 2895-2898
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2016 ◽
Vol 28
(9)
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pp. 094014
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Keyword(s):
2005 ◽
Vol 23
(4)
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pp. 1428
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