Impurity Redistribution in a Semiconductor during Thermal Oxidation

Wen H. Chen; Wen S. Chen

doi:10.1149/1.2426482

Impurity Redistribution in a Semiconductor during Thermal Oxidation

Journal of The Electrochemical Society ◽

10.1149/1.2426482 ◽

1967 ◽

Vol 114 (12) ◽

pp. 1297 ◽

Cited By ~ 11

Author(s):

Wen H. Chen ◽

Wen S. Chen

Keyword(s):

Thermal Oxidation ◽

Impurity Redistribution

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Observation of Impurity Redistribution During Thermal Oxidation of Silicon Using the MOS Structure

Journal of The Electrochemical Society ◽

10.1149/1.2423529 ◽

1965 ◽

Vol 112 (3) ◽

pp. 308 ◽

Cited By ~ 90

Author(s):

B. E. Deal ◽

A. S. Grove ◽

E. H. Snow ◽

C. T. Sah

Keyword(s):

Thermal Oxidation ◽

Mos Structure ◽

Impurity Redistribution

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ChemInform Abstract: NUMERICAL CALCULATION OF IMPURITY REDISTRIBUTION DURING THERMAL OXIDATION OF SEMICONDUCTORS

Chemischer Informationsdienst ◽

10.1002/chin.197427021 ◽

1974 ◽

Vol 5 (27) ◽

Author(s):

R. H. KRAMBECK

Keyword(s):

Numerical Calculation ◽

Thermal Oxidation ◽

Impurity Redistribution

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Impurity Redistribution and Junction Formation in Silicon by Thermal Oxidation

Bell System Technical Journal ◽

10.1002/j.1538-7305.1960.tb03947.x ◽

1960 ◽

Vol 39 (4) ◽

pp. 933-946 ◽

Cited By ~ 58

Author(s):

M. M. Atalla ◽

E. Tannenbaum

Keyword(s):

Thermal Oxidation ◽

Junction Formation ◽

Impurity Redistribution

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Numerical Calculation of Impurity Redistribution during Thermal Oxidation of Semiconductors

Journal of The Electrochemical Society ◽

10.1149/1.2401865 ◽

1974 ◽

Vol 121 (4) ◽

pp. 588 ◽

Cited By ~ 11

Author(s):

R. H. Krambeck

Keyword(s):

Numerical Calculation ◽

Thermal Oxidation ◽

Impurity Redistribution

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A Study of Operating Characteristic of Thermal Desorption and Indirect Thermal Oxidation Process for Dioxin Remediation in the Soil

Journal of the Korean Society for Environmental Technology ◽

10.26511/jkset.21.5.10 ◽

2020 ◽

Vol 21 (5) ◽

pp. 385-389

Author(s):

Sang-An Ha ◽

Jun-Sung Park

Keyword(s):

Thermal Oxidation ◽

Thermal Desorption ◽

Operating Characteristic ◽

Oxidation Process ◽

Thermal Oxidation Process

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Effects of Thermal Oxidation and Subsequent Pickling on Pitting Geometry of Austentitic Stainless Steels in Chloride Solutions

Materials Testing ◽

10.3139/120.110267 ◽

2011 ◽

Vol 53 (10) ◽

pp. 634-638 ◽

Cited By ~ 1

Author(s):

Vesna Alar ◽

Ivan Esih ◽

Ivan Budic ◽

Slavonski Brod

Keyword(s):

Thermal Oxidation ◽

Stainless Steels ◽

Chloride Solutions

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Effects of Acid-leaching and Thermal Oxidation on Surface Characteristics and Aqueous Dispersibility of Silicon Nitride Powders

Journal of Inorganic Materials ◽

10.3724/sp.j.1077.2008.00165 ◽

2008 ◽

Vol 23 (1) ◽

pp. 165-170

Author(s):

Jian-Qing DAI

Keyword(s):

Silicon Nitride ◽

Thermal Oxidation ◽

Acid Leaching ◽

Surface Characteristics ◽

Aqueous Dispersibility

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Triple Bottom Line Analysis of Energy Recovery from Thermal Oxidation of Wastewater Solids Compared to Coal

Proceedings of the Water Environment Federation ◽

10.2175/193864717821495627 ◽

2017 ◽

Vol 2017 (1) ◽

pp. 401-414

Author(s):

Anna J Munson ◽

Webster F Hoener ◽

Robert P Dominak ◽

James E Welp

Keyword(s):

Thermal Oxidation ◽

Energy Recovery ◽

Triple Bottom Line ◽

Bottom Line ◽

Line Analysis

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Erratum: High-pressure thermal oxidation of gallium arsenide at 250°C

Electronics Letters ◽

10.1049/el:19880090 ◽

1988 ◽

Vol 24 (2) ◽

pp. 134

Author(s):

K.N. Bhat ◽

N. Basu

Keyword(s):

High Pressure ◽

Gallium Arsenide ◽

Thermal Oxidation

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A study on improvement of cold flow behaviour and thermal-oxidation stability of Camellia sinensis assamica (tea) oil lubricants as industrial lubricant

IOP Conference Series Materials Science and Engineering ◽

10.1088/1757-899x/1070/1/012124 ◽

2021 ◽

Vol 1070 (1) ◽

pp. 012124

Author(s):

Nabajit D Choudhury ◽

Niharendu Saha ◽

Rupam Kataki

Keyword(s):

Thermal Oxidation ◽

Camellia Sinensis ◽

Oxidation Stability ◽

Flow Behaviour ◽

Cold Flow ◽

Thermal Oxidation Stability

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