Observation of Impurity Redistribution During Thermal Oxidation of Silicon Using the MOS Structure

1965 ◽  
Vol 112 (3) ◽  
pp. 308 ◽  
Author(s):  
B. E. Deal ◽  
A. S. Grove ◽  
E. H. Snow ◽  
C. T. Sah
Keyword(s):  
Thermal Oxidation ◽  
Mos Structure ◽  
Impurity Redistribution

Thermal Oxidation of SiC and Electrical Properties of Al–SiO2–SiC MOS Structure

1982 ◽  
Vol 21 (Part 1, No. 4) ◽  
pp. 579-585 ◽  
Author(s):  
Akira Suzuki ◽  
Hisashi Ashida ◽  
Nobuyuki Furui ◽  
Kazunobu Mameno ◽  
Hiroyuki Matsunami
Keyword(s):  
Electrical Properties ◽  
Thermal Oxidation ◽  
Mos Structure

Effects of Thermal Oxidation and Subsequent Pickling on Pitting Geometry of Austentitic Stainless Steels in Chloride Solutions

2011 ◽  
Vol 53 (10) ◽  
pp. 634-638 ◽  
Author(s):  
Vesna Alar ◽  
Ivan Esih ◽  
Ivan Budic ◽  
Slavonski Brod
Keyword(s):  
Thermal Oxidation ◽  
Stainless Steels ◽  
Chloride Solutions
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