Numerical Calculation of Impurity Redistribution during Thermal Oxidation of Semiconductors

R. H. Krambeck

doi:10.1149/1.2401865

Numerical Calculation of Impurity Redistribution during Thermal Oxidation of Semiconductors

Journal of The Electrochemical Society ◽

10.1149/1.2401865 ◽

1974 ◽

Vol 121 (4) ◽

pp. 588 ◽

Cited By ~ 11

Author(s):

R. H. Krambeck

Keyword(s):

Numerical Calculation ◽

Thermal Oxidation ◽

Impurity Redistribution

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ChemInform Abstract: NUMERICAL CALCULATION OF IMPURITY REDISTRIBUTION DURING THERMAL OXIDATION OF SEMICONDUCTORS

Chemischer Informationsdienst ◽

10.1002/chin.197427021 ◽

1974 ◽

Vol 5 (27) ◽

Author(s):

R. H. KRAMBECK

Keyword(s):

Numerical Calculation ◽

Thermal Oxidation ◽

Impurity Redistribution

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Impurity Redistribution in a Semiconductor during Thermal Oxidation

Journal of The Electrochemical Society ◽

10.1149/1.2426482 ◽

1967 ◽

Vol 114 (12) ◽

pp. 1297 ◽

Cited By ~ 11

Author(s):

Wen H. Chen ◽

Wen S. Chen

Keyword(s):

Thermal Oxidation ◽

Impurity Redistribution

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Observation of Impurity Redistribution During Thermal Oxidation of Silicon Using the MOS Structure

Journal of The Electrochemical Society ◽

10.1149/1.2423529 ◽

1965 ◽

Vol 112 (3) ◽

pp. 308 ◽

Cited By ~ 90

Author(s):

B. E. Deal ◽

A. S. Grove ◽

E. H. Snow ◽

C. T. Sah

Keyword(s):

Thermal Oxidation ◽

Mos Structure ◽

Impurity Redistribution

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Impurity Redistribution and Junction Formation in Silicon by Thermal Oxidation

Bell System Technical Journal ◽

10.1002/j.1538-7305.1960.tb03947.x ◽

1960 ◽

Vol 39 (4) ◽

pp. 933-946 ◽

Cited By ~ 58

Author(s):

M. M. Atalla ◽

E. Tannenbaum

Keyword(s):

Thermal Oxidation ◽

Junction Formation ◽

Impurity Redistribution

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A Study on Numerical Calculation of Inrush Current in Three-Phase Transformers

IEEJ Transactions on Power and Energy ◽

10.1541/ieejpes.133.579 ◽

2013 ◽

Vol 133 (7) ◽

pp. 579-586 ◽

Cited By ~ 3

Author(s):

Yoshitaka Tokunaga

Keyword(s):

Numerical Calculation ◽

Inrush Current ◽

Three Phase

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NUMERICAL CALCULATION OF NATURAL AND MIXED CONVECTION IN A CZOCHRALSKI CRUCIBLE UNDER TRANSVERSE MAGNETIC FIELDS

Proceeding of International Heat Transfer Conference 11 ◽

10.1615/ihtc11.3110 ◽

1998 ◽

Cited By ~ 1

Author(s):

Masato Akamatsu ◽

Koichi Kakimoto ◽

Hiroyuki Ozoe

Keyword(s):

Numerical Calculation ◽

Magnetic Fields ◽

Mixed Convection ◽

Transverse Magnetic

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A numerical calculation of propeller performance at static condition and its comparison with experiment.

The Journal of the Japan Society of Aeronautical Engineering ◽

10.2322/jjsass1969.32.518 ◽

1984 ◽

Vol 32 (368) ◽

pp. 518-525

Author(s):

Matsunosuke IWASAKI ◽

Keigo WATANABE

Keyword(s):

Numerical Calculation ◽

Static Condition ◽

Comparison With Experiment ◽

Propeller Performance

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Multinozzle plume flow fields - Structure and numerical calculation

10.2514/6.1977-710 ◽

1977 ◽

Cited By ~ 3

Author(s):

S. RUDMAN

Keyword(s):

Numerical Calculation ◽

Flow Fields ◽

Plume Flow

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Algorithm of Numerical Calculation on Lorentz Mie Theory

PIERS Online ◽

10.2529/piers050127104820 ◽

2005 ◽

Vol 1 (6) ◽

pp. 691-694 ◽

Cited By ~ 13

Author(s):

Jianqi Shen

Keyword(s):

Numerical Calculation ◽

Mie Theory

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A Study of Operating Characteristic of Thermal Desorption and Indirect Thermal Oxidation Process for Dioxin Remediation in the Soil

Journal of the Korean Society for Environmental Technology ◽

10.26511/jkset.21.5.10 ◽

2020 ◽

Vol 21 (5) ◽

pp. 385-389

Author(s):

Sang-An Ha ◽

Jun-Sung Park

Keyword(s):

Thermal Oxidation ◽

Thermal Desorption ◽

Operating Characteristic ◽

Oxidation Process ◽

Thermal Oxidation Process

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