TEOS and Ozone Atmospheric Pressure CVD of Borophosphosilicate Glass Films Using Triethylborate and Trimethylphosphate

1993 ◽  
Vol 140 (10) ◽  
pp. 2922-2927 ◽  
Author(s):  
K. Fujino ◽  
Y. Nishimoto ◽  
N. Tokumasu ◽  
K. Maeda
Keyword(s):  
Atmospheric Pressure ◽  
Borophosphosilicate Glass ◽  
Glass Films

Determination of the composition and thickness of borophosphosilicate glass films by infrared ellipsometry

1994 ◽  
Vol 65 (10) ◽  
pp. 1236-1238 ◽  
Author(s):  
R. Ossikovski ◽  
N. Blayo ◽  
B. Drévillon ◽  
M. Firon ◽  
B. Delahaye ◽  
...  
Keyword(s):  
Infrared Ellipsometry ◽  
Borophosphosilicate Glass ◽  
Glass Films

Identification of segregation from borophosphosilicate glass films during annealing

1992 ◽  
Vol 60 (22) ◽  
pp. 2761-2763 ◽  
Author(s):  
S. Imai ◽  
Y. Yabuuchi ◽  
Y. Terai ◽  
T. Yasui ◽  
C. Kudo ◽  
...  
Keyword(s):  
Borophosphosilicate Glass ◽  
Glass Films

Growth of the high reflectivity Bi2O3 glass films by atmospheric pressure halide CVD

2004 ◽  
Vol 26 (4) ◽  
pp. 413-415 ◽  
Author(s):  
T Takeyama ◽  
N Takahashi ◽  
T Nakamura ◽  
S Ito
Keyword(s):  
Atmospheric Pressure ◽  
High Reflectivity ◽  
Glass Films

Stability of Diborane Mixtures Used for Borophosphosilicate Glass Films

1993 ◽  
Vol 140 (6) ◽  
pp. 1709-1713 ◽  
Author(s):  
Edward T. Flaherty ◽  
Jeff Marshall ◽  
Pamela Albert ◽  
Ann Marie Brzychcy ◽  
Delya Forbes ◽  
...  
Keyword(s):  
Borophosphosilicate Glass ◽  
Glass Films
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