Properties of borophosphosilicate glass films deposited by different chemical vapor deposition techniques
1992 ◽
Vol 10
(2)
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pp. 633
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2008 ◽
Vol 47
(3)
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pp. 1735-1739
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2004 ◽
Vol 33
(5)
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pp. 271-284
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1998 ◽
Vol 145
(6)
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pp. 2051-2057
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1987 ◽
Vol 134
(7)
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pp. 1744-1749
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Keyword(s):
Keyword(s):
2017 ◽
Vol 10
(1)
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pp. 371-380
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Keyword(s):
1986 ◽
Vol 133
(9)
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pp. 1943-1950
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Keyword(s):