Properties of borophosphosilicate glass films deposited by different chemical vapor deposition techniques

Author(s):  
S. Rojas
2017 ◽  
Vol 10 (1) ◽  
pp. 371-380 ◽  
Author(s):  
Qian Shen ◽  
Annie Ng ◽  
Zhiwei Ren ◽  
Huseyin Cem Gokkaya ◽  
Aleksandra B. Djurišić ◽  
...  

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