Mechanism of highly preferred (002) texture of Ti films sputter deposited on water-absorbed borophosphosilicate glass films

1999 ◽  
Vol 17 (4) ◽  
pp. 1585
Author(s):  
Tomoyuki Yoshida ◽  
Koyu Aoki ◽  
Yasuichi Mitsushima
Keyword(s):  
Sputter Deposited ◽  
Borophosphosilicate Glass ◽  
Ti Films ◽  
Glass Films

Physical Properties of Thick Sputter-Deposited Glass Films

1973 ◽  
Vol 120 (11) ◽  
pp. 1535 ◽  
Author(s):  
D. M. Mattox ◽  
G. J. Kominiak
Keyword(s):  
Physical Properties ◽  
Sputter Deposited ◽  
Glass Films

The Properties of Al-Cu/Ti Films Sputter Deposited at Elevated Temperatures and High DC BIAS

1989 ◽  
Author(s):  
T. Hariu ◽  
K. Watanabe ◽  
M. Inoue ◽  
T. Takada ◽  
H. Tsuchikawa
Keyword(s):  
Elevated Temperatures ◽  
Dc Bias ◽  
Sputter Deposited ◽  
Ti Films

Determination of the composition and thickness of borophosphosilicate glass films by infrared ellipsometry

1994 ◽  
Vol 65 (10) ◽  
pp. 1236-1238 ◽  
Author(s):  
R. Ossikovski ◽  
N. Blayo ◽  
B. Drévillon ◽  
M. Firon ◽  
B. Delahaye ◽  
...  
Keyword(s):  
Infrared Ellipsometry ◽  
Borophosphosilicate Glass ◽  
Glass Films

Identification of segregation from borophosphosilicate glass films during annealing

1992 ◽  
Vol 60 (22) ◽  
pp. 2761-2763 ◽  
Author(s):  
S. Imai ◽  
Y. Yabuuchi ◽  
Y. Terai ◽  
T. Yasui ◽  
C. Kudo ◽  
...  
Keyword(s):  
Borophosphosilicate Glass ◽  
Glass Films

Stability of Diborane Mixtures Used for Borophosphosilicate Glass Films

1993 ◽  
Vol 140 (6) ◽  
pp. 1709-1713 ◽  
Author(s):  
Edward T. Flaherty ◽  
Jeff Marshall ◽  
Pamela Albert ◽  
Ann Marie Brzychcy ◽  
Delya Forbes ◽  
...  
Keyword(s):  
Borophosphosilicate Glass ◽  
Glass Films
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