Metal-Organic Atomic Layer Deposition of Metals for Applications in Interconnect Technology

2019 ◽  
Vol 1 (10) ◽  
pp. 51-56 ◽  
Author(s):  
Oscar van der Straten ◽  
S.M. Rossnagel ◽  
J.P. Doyle ◽  
K.P. Rodbell
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Metal Organic ◽  
Interconnect Technology

Superconducting niobium nitride thin films deposited by metal organic plasma-enhanced atomic layer deposition

2012 ◽  
Vol 26 (2) ◽  
pp. 025008 ◽  
Author(s):  
Mario Ziegler ◽  
Ludwig Fritzsch ◽  
Julia Day ◽  
Sven Linzen ◽  
Solveig Anders ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Niobium Nitride ◽  
Layer Deposition ◽  
Metal Organic

Metal–Organic Framework Thin Films as Platforms for Atomic Layer Deposition of Cobalt Ions To Enable Electrocatalytic Water Oxidation

2015 ◽  
Vol 7 (51) ◽  
pp. 28223-28230 ◽  
Author(s):  
Chung-Wei Kung ◽  
Joseph E. Mondloch ◽  
Timothy C. Wang ◽  
Wojciech Bury ◽  
William Hoffeditz ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Water Oxidation ◽  
Metal Organic Framework ◽  
Atomic Layer ◽  
Cobalt Ions ◽  
Layer Deposition ◽  
Metal Organic ◽  
Organic Framework
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