Growth Kinetics and Electrical Properties of Ultrathin Silicon Dioxide Layers

2019 ◽  
Vol 2 (2) ◽  
pp. 189-203 ◽  
Author(s):  
Hisham Z. Massoud
Keyword(s):  
Electrical Properties ◽  
Silicon Dioxide ◽  
Growth Kinetics

Comparison between Ni-SALICIDE and Self-Aligned Lift-Off Used in Fabrication of Ohmic Contacts for SiC Power MOSFET

2019 ◽  
Vol 963 ◽  
pp. 490-493
Author(s):  
Tomasz Sledziewski ◽  
Tobias Erlbacher ◽  
Anton Bauer ◽  
Lothar Frey ◽  
Xi Ming Chen ◽  
...  
Keyword(s):  
Electrical Properties ◽  
Silicon Dioxide ◽  
Ohmic Contacts ◽  
Positive Impact ◽  
Specific Resistance ◽  
Power Mosfet ◽  
Interlayer Dielectric ◽  
Lift Off ◽  
P Type

A comparison between self-aligned process (using lift-off) and Ni-SALICIDE used in fabrication of ohmic contacts for SiC Power MOSFET is done. Both processes are demonstrated for 3.3 kV SiC VDMOS transistors fabricated on 100 mm substrates. It is shown that the Ni-SALICIDE process with first silicidation at 500 °C does not degrade the electrical properties of silicon dioxide; particularly, a degradation of the interlayer dielectric between source and gate is not evident. Additionally, this first silicidation is found to have a positive impact on the specific resistance of contacts formed on p-type SiC using NiAl2.6% as an ohmic metal.

Growth kinetics of thin silicon dioxide in a controlled ambient oxidation system

1984 ◽  
Vol 44 (6) ◽  
pp. 626-628 ◽  
Author(s):  
K. K. Ng ◽  
W. J. Polito ◽  
J. R. Ligenza
Keyword(s):  
Silicon Dioxide ◽  
Growth Kinetics ◽  
Thin Silicon ◽  
Kinetics Of ◽  
Oxidation System

Morphological and Electrical Properties of Silicon Dioxide-Based Interdigitated Electrode Arrays

2015 ◽  
Vol 1109 ◽  
pp. 253-256 ◽  
Author(s):  
M.A. Farehanim ◽  
U. Hashim ◽  
Norhayati Soin ◽  
A.H. Azman ◽  
S. Norhafiezah ◽  
...  
Keyword(s):  
Electrical Properties ◽  
Silicon Dioxide ◽  
Ph Value ◽  
Ph Measurement ◽  
Electrode Arrays ◽  
Interdigitated Electrode ◽  
Buffer Solutions ◽  
Ph Values ◽  
Ph Buffer ◽  
Higher Sensitivity

The electrical performances of silicon dioxide-based Interdigitated electrodes (IDEs) as biosensor were developed. The IDEs was made up by two individually addressable Interdigitated comb-like finger structure have frequently been suggested as a biosensor which promises higher sensitivity compared to conventional parallel electrodes. The purpose of this paper was to investigate the capacitance test and impedance test to taken with various pH solution to observe the response of the sensor with different pH values. Purchased pH buffer solutions which varied from pH2 to pH10 are dropped on the microelectrode and the effect on it is investigated for the application in pH measurement. This research has proven that increase in pH value from acidic to alkaline is proportional with capacitance. The measured values of capacitance with respect to each pH concentrations applied during the measurements were repeatable and reproducible.

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